Reduced basis method for real-time inverse scatterometry
2008 ◽
Vol 198
(2)
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pp. 269-279
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Keyword(s):
2012 ◽
Vol 231
(23)
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pp. 7756-7779
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Keyword(s):
2017 ◽
pp. 55-76
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Keyword(s):
2010 ◽
Vol 28
(1)
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pp. 122-148
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