Fringe projection based high-speed 3D sensor for real-time measurements

Author(s):  
Christian Bräuer-Burchardt ◽  
Andreas Breitbarth ◽  
Peter Kühmstedt ◽  
Ingo Schmidt ◽  
Matthias Heinze ◽  
...  
2017 ◽  
Author(s):  
Shijie Feng ◽  
Qian Chen ◽  
Chao Zuo ◽  
Anand Asundi

Author(s):  
Yi Zheng ◽  
Beiwen Li

Abstract In-situ inspection has drawn many attentions in manufacturing due to the importance of quality assurance. With the rapid growth of additive manufacturing technology, the importance of in-line/in-situ inspections has been raised to a higher level due to many uncertainties that could occur during an additive printing process. Given this, having accurate and robust in-situ monitoring can assist corrective actions for a closed-loop control of a manufacturing process. Contact 3D profilometers such as stylus profilometers or coordinate measuring machines can achieve very high accuracies. However, due to the requirement for physical contact, such methods have limited measurement speeds and may cause damage to the tested surface. Thus, contact methods are not quite suitable for real-time in-situ metrology. Non-contact methods include both passive and active methods. Passive methods (e.g., focus variation or stereo vision) hinges on image-based depth analysis, yet the accuracies of passive methods may be impacted by light conditions of the environment and the texture quality of the surface. Active 3D scanning methods such as laser scanning or structured light are suitable for instant quality inspection due to their ability to conduct a quick non-contact 3D scan of the entire surface of a workpiece. Specifically, the fringe projection technique, as a variation of the structured light technique, has demonstrated significant potential for real-time in-situ monitoring and inspection given its merits of conducting simultaneous high-speed (from 30 Hz real-time to kilohertz high speeds) and high accuracy (tens of μm) measurements. However, high-speed 3D scanning methods like fringe projection technique are typically based on triangulation principle, meaning that the depth information is retrieved by analyzing the triangulation relationship between the light emitter (i.e., projector), the image receiver (i.e., camera) and the tested sample surface. Such measurement scheme cannot reconstruct 3D surfaces where large geometrical variations are present, such as a deep-hole or a stair geometry. This is because large geometrical variations will block the auxiliary light used in the triangulation based methods, which will resultantly cause a shadowed area to occur. In this paper, we propose a uniaxial fringe projection technique to address such limitation. We measured a stair model using both conventional triangulation based fringe projection technique and the proposed method for comparison. Our experiment demonstrates that the proposed uniaxial fringe projection technique can perform high-speed 3D scanning without shadows appearing in the scene. Quantitative testing shows that an accuracy of 35 μm can be obtained by measuring a step-height object using the proposed uniaxial fringe projection system.


1995 ◽  
Author(s):  
Rod Clark ◽  
John Karpinsky ◽  
Gregg Borek ◽  
Eric Johnson
Keyword(s):  

Author(s):  
Kenneth Krieg ◽  
Richard Qi ◽  
Douglas Thomson ◽  
Greg Bridges

Abstract A contact probing system for surface imaging and real-time signal measurement of deep sub-micron integrated circuits is discussed. The probe fits on a standard probe-station and utilizes a conductive atomic force microscope tip to rapidly measure the surface topography and acquire real-time highfrequency signals from features as small as 0.18 micron. The micromachined probe structure minimizes parasitic coupling and the probe achieves a bandwidth greater than 3 GHz, with a capacitive loading of less than 120 fF. High-resolution images of submicron structures and waveforms acquired from high-speed devices are presented.


2007 ◽  
Author(s):  
R. E. Crosbie ◽  
J. J. Zenor ◽  
R. Bednar ◽  
D. Word ◽  
N. G. Hingorani

2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Florian Roessler ◽  
André Streek

Abstract In laser processing, the possible throughput is directly scaling with the available average laser power. To avoid unwanted thermal damage due to high pulse energy or heat accumulation during MHz-repetition rates, energy distribution over the workpiece is required. Polygon mirror scanners enable high deflection speeds and thus, a proper energy distribution within a short processing time. The requirements of laser micro processing with up to 10 kW average laser powers and high scan speeds up to 1000 m/s result in a 30 mm aperture two-dimensional polygon mirror scanner with a patented low-distortion mirror configuration. In combination with a field programmable gate array-based real-time logic, position-true high-accuracy laser switching is enabled for 2D, 2.5D, or 3D laser processing capable to drill holes in multi-pass ablation or engraving. A special developed real-time shifter module within the high-speed logic allows, in combination with external axis, the material processing on the fly and hence, processing of workpieces much larger than the scan field.


Sensors ◽  
2021 ◽  
Vol 21 (14) ◽  
pp. 4865
Author(s):  
Kinzo Kishida ◽  
Artur Guzik ◽  
Ken’ichi Nishiguchi ◽  
Che-Hsien Li ◽  
Daiji Azuma ◽  
...  

Distributed acoustic sensing (DAS) in optical fibers detect dynamic strains or sound waves by measuring the phase or amplitude changes of the scattered light. This contrasts with other distributed (and more conventional) methods, such as distributed temperature (DTS) or strain (DSS), which measure quasi-static physical quantities, such as intensity spectrum of the scattered light. DAS is attracting considerable attention as it complements the conventional distributed measurements. To implement DAS in commercial applications, it is necessary to ensure a sufficiently high signal-noise ratio (SNR) for scattered light detection, suppress its deterioration along the sensing fiber, achieve lower noise floor for weak signals and, moreover, perform high-speed processing within milliseconds (or sometimes even less). In this paper, we present a new, real-time DAS, realized by using the time gated digital-optical frequency domain reflectometry (TGD-OFDR) method, in which the chirp pulse is divided into overlapping bands and assembled after digital decoding. The developed prototype NBX-S4000 generates a chirp signal with a pulse duration of 2 μs and uses a frequency sweep of 100 MHz at a repeating frequency of up to 5 kHz. It allows one to detect sound waves at an 80 km fiber distance range with spatial resolution better than a theoretically calculated value of 2.8 m in real time. The developed prototype was tested in the field in various applications, from earthquake detection and submarine cable sensing to oil and gas industry applications. All obtained results confirmed effectiveness of the method and performance, surpassing, in conventional SM fiber, other commercially available interrogators.


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