Development of ultra-precision micro-cavity measurement technique in HIT-UOI

2010 ◽  
Author(s):  
Jiwen Cui ◽  
Lei Li ◽  
Jiubin Tan
Keyword(s):  
Measurement Technique ◽  
Ultra Precision ◽  
Cavity Measurement ◽  
Micro Cavity

Experimental Study of the Light Scattering Induced by the Surface Roughness of the Ultraprecision Machined Workpiece

2010 ◽  
Vol 143-144 ◽  
pp. 1091-1096
Author(s):  
Chun Der Cheng ◽  
Hsi Hsun Tsai ◽  
Hui Ping Feng
Keyword(s):  
Surface Roughness ◽  
Light Scattering ◽  
Measurement Technique ◽  
Precision Machining ◽  
Diode Array ◽  
Machined Surface ◽  
Tool Marks ◽  
Scattering Effect ◽  
Photo Diode ◽  
Ultra Precision

An in-situ measurement technique of the surface roughness of ultra-precision machining by optical characteristic effects is fundamental thanks to the probe-less which would avoid the contact damage on the surface. Since the plastic lens molding reprints the roughness from the mould core fabricated by machining, the tool marks induce the poor surface of the plastic lens. By a laser with a short wavelength of He-Ne of 632 nanometers, the machined surface would reflect the input light. Several samples with different surface roughness of the aluminum by varying the feed rate of the ultra-precision machining are used to be measured by the He-Ne laser. The 1 x 16 photo-diode array with the pitch of 2.0 mm is constructed to measure the distribution of the optical scattering effect under the light source of He-Ne laser. Results show that the higher surface roughness gives a more expanse distribution of the light scattering. Besides, the BSDF of the machined surface is proportional to roughness. Using the ratio of the main and side measuring channels of the photo-diode array would give a suitable approach to construct the relationship between the light scattering and surface roughness. Therefore, the laser and the photodiode array would predict well the roughness of the ultra-precision machined surfaces of aluminum. The on-line measurement technique for the roughness by reflected light scattering effect from the ultra-precision machined surface is constructed nice in this study.

An Ultra-Precision Air-Pin Sensor and Its Dynamic Characteristics

2005 ◽  
Vol 295-296 ◽  
pp. 557-562
Author(s):  
Hui Zhang ◽  
S.X. Deng ◽  
Hui Qiang Wang ◽  
S. Chen
Keyword(s):  
Response Time ◽  
Measurement Technique ◽  
Dynamic Characteristics ◽  
Measurement Accuracy ◽  
Measurement Range ◽  
Electronic Sensor ◽  
Dimension Measurement ◽  
Ultra Precision ◽  
New Type ◽  
Better Than

The non-contact pneumatic measurement technique is useful for dimension measurement. The authors have developed a new type of air-pin pneumatic-electronic sensor. The ultra-precision air-pin sensor and the dynamic characteristics of the sensor are investigated. The measurement accuracy of the air-pin pneumatic-electronic sensor is better than 0.1µm for the 10µm measurement range. The response time is less then 10ms.

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