Thin film thickness and refractive index measurement by multiple beam interferometry and fast spectral correlation method

2010 ◽  
Author(s):  
Terry Yuan-Fang Chen ◽  
Chien-Chih Chen
Keyword(s):  
Thin Film ◽  
Refractive Index ◽  
Film Thickness ◽  
Correlation Method ◽  
Thin Film Thickness ◽  
Spectral Correlation ◽  
Refractive Index Measurement ◽  
Multiple Beam ◽  
Index Measurement ◽  
Multiple Beam Interferometry

scholarly journals Measurement of the Beruforge 152DL thin-film lubricant using a developed thin-film thickness standard

2020 ◽  
Vol 9 (1) ◽  
pp. 157-165 ◽  
Author(s):  
Sebastian Metzner ◽  
Tamara Reuter ◽  
Tino Hausotte
Keyword(s):  
Thin Film ◽  
Refractive Index ◽  
Film Thickness ◽  
Optical Measurement ◽  
Measurement Techniques ◽  
Forming Process ◽  
Thin Film Thickness ◽  
Temperature Changes ◽  
Thickness Standard ◽  
Continuous Measuring

Abstract. Systematic deviations due to remaining lubricant on the workpiece have a significant influence on the measurement of sheet-bulk metal formed parts. The expected layer thickness for the workpieces after the forming process is less than 35 µm. For the determination of the refractive index of the lubricant and thus the effects of the lubricant on optical measurement techniques, a lubricant thin-film thickness standard was developed which represents a continuous measuring range from 6 to 100 µm. To determine the refractive index, the thin-film thickness standard was measured with a coaxial interferometric measurement system in various thickness ranges. Due to the knowledge of the optical and the geometrical path length, the refractive index can then be determined approximately. In addition, an XY stage was used to scan the entire thin-film area of the standard. The measurement setup in a temperature box allows for determining the effects of temperature changes on the optical properties of the lubricant.

Sign in / Sign up

Export Citation Format

Share Document