Dynamic MEMS characterization system using differential phase measurement method

2010 ◽  
Author(s):  
Tong Guo ◽  
Zhichao Wu ◽  
Long Ma ◽  
Xing Fu ◽  
Xiaotang Hu
2018 ◽  
Vol 36 (18) ◽  
pp. 4046-4050 ◽  
Author(s):  
Ke Chen ◽  
Min Guo ◽  
Yang Yang ◽  
Kang Liu ◽  
Wanjin Cai ◽  
...  

2021 ◽  
Author(s):  
Xingyang Qi ◽  
Canlin Zhou ◽  
Yanping Ding ◽  
Shuchun Si ◽  
Hui Li

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