Development of sol-gel derived lead zirconate titanate (PZT) thin films with a nonporous Pt/Ti bottom electrode

2011 ◽  
Author(s):  
Qing Guo ◽  
G. Z. Cao ◽  
I. Y. Shen
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Bottom Electrode ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Pzt Thin Films ◽  
Zirconate Titanate

Reactive ion etching of sol-gel deposited lead zirconate titanate (pzt) thin films in sf6 plasmas

2001 ◽  
Vol 37 (1-4) ◽  
pp. 67-74 ◽  
Author(s):  
George McLane ◽  
Ronald Polcawich ◽  
Jeffrey Pulskamp ◽  
Brett Piekarski ◽  
Madan Dubey ◽  
...  
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Reactive Ion Etching ◽  
Lead Zirconate ◽  
Ion Etching ◽  
Pzt Thin Films ◽  
Zirconate Titanate

A Study on the Microstructure of Preferred Orientation of Lead Zirconate Titanate (PZT) Thin Films

1997 ◽  
Vol 12 (4) ◽  
pp. 1043-1047 ◽  
Author(s):  
Chang Jung Kim ◽  
Dae Sung Yoon ◽  
Joon Sung Lee ◽  
Chaun Gi Choi ◽  
Kwangsoo No
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Preferred Orientation ◽  
X Ray Diffraction ◽  
Pzt Thin Films ◽  
X Ray ◽  
Zirconate Titanate

The lead zirconate titanate (PZT) thin films were fabricated using sol-gel spin coating onto Pt/Ti/glass substrates. Effects of the holding time for pyrolysis and the coating cycle on the preferred orientation of the PZT thin films were studied. The films were fabricated with different coating cycles (3, 5, 7, 9, 11), dried at 330 °C for different holding times (5, 30, 60 min), and then annealed at the same temperature of 650 °C using rapid thermal annealing (RTA). The preferred orientations of the films were investigated using x-ray diffraction and glancing angle x-ray diffraction. The microstructure and the selected area diffraction pattern of the PZT thin films were also investigated using scanning electron microscopy (SEM) and transmission electron microscopy (TEM), respectively.

Phase transformations in rapid thermal processed lead zirconate titanate

1995 ◽  
Vol 10 (12) ◽  
pp. 3149-3159 ◽  
Author(s):  
Ellen M. Griswold ◽  
L. Weaver ◽  
M. Sayer ◽  
I.D. Calder
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Perovskite Phase ◽  
Sol Gel ◽  
Pyrochlore Phase ◽  
Lead Zirconate ◽  
Grain Structure ◽  
Avrami Model ◽  
Pzt Thin Films ◽  
Zirconate Titanate

The crystallization kinetics of the pyrochlore to perovskite phase transformation in lead zirconate titanate (PZT) thin films have been analyzed using rapid thermal processing (RTP). Sol-gel PZT thin films, fabricated on platinum electrodes, were annealed at 550 °C to 650 °C with hold times ranging from 1 s to 5 min. Glancing angle x-ray diffraction (XRD) was used for depth profiling to identify the location of phases in the films. Transmission electron microscopy (TEM) provided information on grain structure, nucleation, and growth. The phase information was correlated to the ferroelectric and dielectric properties. The perovskite phase nucleated in the pyrochlore phase throughout the film thickness, and at 650 °C the transformation was complete in 15 s. Fast growing (100) PZT nucleated at the platinum and consumed a small-grained matrix until a columnar structure was obtained. A ramp rate of 100 °C/s was sufficiently fast to prevent transformation during heating and allowed the direct application of an Avrami model for transformation kinetics. An activation energy of 610 kJ/mol was determined.

Early Stages of Crystallization of Sol−Gel-Derived Lead Zirconate Titanate Thin Films

2003 ◽  
Vol 15 (5) ◽  
pp. 1147-1155 ◽  
Author(s):  
A. Wu ◽  
P. M. Vilarinho ◽  
I. Reaney ◽  
I. M. Miranda Salvado
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Early Stages ◽  
Zirconate Titanate

scholarly journals Interfacial mechanisms controlling phase formation in sol-gel derived lead zirconate titanate thin films

1994 ◽  
Vol 17 (6) ◽  
pp. 1005-1014 ◽  
Author(s):  
S B Majumder ◽  
V N Kulkarni ◽  
Y N Mohapatra ◽  
D C Agrawal
Keyword(s):  
Thin Films ◽  
Phase Formation ◽  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Zirconate Titanate

Microstructure of Solution-Processed Lead Zirconate Titanate (PZT) Thin Films

1991 ◽  
Vol 74 (6) ◽  
pp. 1455-1458 ◽  
Author(s):  
Altaf H. Carim ◽  
Bruce A. Tuttle ◽  
Daniel H. Doughty ◽  
Sheri L. Martinez
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Solution Processed ◽  
Pzt Thin Films ◽  
Zirconate Titanate

Densification and enhanced polarisation in lead zirconate titanate sol–gel thin films

2009 ◽  
Vol 113 (1) ◽  
pp. 135-139 ◽  
Author(s):  
Anirban Chowdhury ◽  
Mikael A. Khan ◽  
Craig James ◽  
Steven J. Milne
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Zirconate Titanate
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