Fabrication and testing of MEMS-based optical filter combined with a HgCdTe detector

2011 ◽  
Author(s):  
Dmitry A. Kozak ◽  
Bautista Fernandez ◽  
Michael L. Morley ◽  
Silviu Velicu ◽  
Joel Kubby
2010 ◽  
Author(s):  
Dmitry A. Kozak ◽  
Bautista Fernandez ◽  
Silviu Velicu ◽  
Joel Kubby

2002 ◽  
Vol 722 ◽  
Author(s):  
T. S. Sriram ◽  
B. Strauss ◽  
S. Pappas ◽  
A. Baliga ◽  
A. Jean ◽  
...  

AbstractThis paper describes the results of extensive performance and reliability characterization of a silicon-based surface micro-machined tunable optical filter. The device comprises a high-finesse Fabry-Perot etalon with one flat and one curved dielectric mirror. The curved mirror is mounted on an electrostatically actuated silicon nitride membrane tethered to the substrate using silicon nitride posts. A voltage applied to the membrane allows the device to be tuned by adjusting the length of the cavity. The device is coupled optically to an input and an output single mode fiber inside a hermetic package. Extensive performance characterization (over operating temperature range) was performed on the packaged device. Parameters characterized included tuning characteristics, insertion loss, filter line-width and side mode suppression ratio. Reliability testing was performed by subjecting the MEMS structure to a very large number of actuations at an elevated temperature both inside the package and on a test board. The MEMS structure was found to be extremely robust, running trillions of actuations without failures. Package level reliability testing conforming to Telcordia standards indicated that key device parameters including insertion loss, filter line-width and tuning characteristics did not change measurably over the duration of the test.


2021 ◽  
Vol 53 (5) ◽  
Author(s):  
Asmaa Ibrahim ◽  
Josep Prat ◽  
Tawfik Ismail

Author(s):  
Weijun Jiang ◽  
Lu Xu ◽  
Xiaolong Liu ◽  
Yu Yu ◽  
Yuan Yu ◽  
...  
Keyword(s):  

Sensors ◽  
2021 ◽  
Vol 21 (12) ◽  
pp. 4081
Author(s):  
Suejit Pechprasarn ◽  
Chayanisa Sukkasem ◽  
Phitsini Suvarnaphaet

In our previous work, we have demonstrated that dielectric elastic grating can support Fabry–Perot modes and provide embedded optical interferometry to measure ultrasonic pressure. The Fabry–Perot modes inside the grating provide an enhancement in sensitivity and figure of merit compared to thin film-based Fabry–Perot structures. Here, in this paper, we propose a theoretical framework to explain that the elastic grating also supports dielectric waveguide grating mode, in which optical grating parameters control the excitation of the two modes. The optical properties of the two modes, including coupling conditions and loss mechanisms, are discussed. The proposed grating has the grating period in micron scale, which is shorter than the wavelength of the incident ultrasound leading to an ultrasonic scattering. The gap regions in the grating allow the elastic grating thickness to be compressed by the incident ultrasound and coupled to a surface acoustic wave mode. The thickness compression can be measured using an embedded interferometer through one of the optical guided modes. The dielectric waveguide grating is a narrow bandpass optical filter enabling an ultrasensitive mode to sense changes in optical displacement. This enhancement in mechanical and optical properties gives rise to a broader detectable pressure range and figure of merit in ultrasonic detection; the detectable pressure range and figure of merit can be enhanced by 2.7 times and 23 times, respectively, compared to conventional Fabry–Perot structures.


2021 ◽  
Vol 13 (1) ◽  
pp. 1-19
Author(s):  
Pengfei Ge ◽  
Xintong Ling ◽  
Jiaheng Wang ◽  
Xiao Liang ◽  
Shuo Li ◽  
...  

2002 ◽  
Vol 208 (1-3) ◽  
pp. 167-172 ◽  
Author(s):  
Silvia Abad ◽  
Manuel López-Amo ◽  
Sebastián Jarabo

2018 ◽  
Vol 536 ◽  
pp. 847-849 ◽  
Author(s):  
Akihiko Ikeda ◽  
Toshihiro Nomura ◽  
Yasuhiro H. Matsuda ◽  
Shuntaro Tani ◽  
Yohei Kobayashi ◽  
...  

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