Highly efficient diffractive beam splitters surface-structured on submicron scale using deep-UV laser interference lithography

2011 ◽  
Author(s):  
Jun Amako ◽  
Daisuke Sawaki ◽  
Eiichi Fujii
Keyword(s):  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Uv Laser ◽  
Laser Interference ◽  
Beam Splitters ◽  
Highly Efficient ◽  
Submicron Scale ◽  
Deep Uv

scholarly journals UV-Laser Interference Lithography for Local Functionalization of Plasmonic Nanostructures with Responsive Hydrogel

2020 ◽  
Vol 124 (5) ◽  
pp. 3297-3305 ◽  
Author(s):  
Nestor Gisbert Quilis ◽  
Simone Hageneder ◽  
Stefan Fossati ◽  
Simone K. Auer ◽  
Priyamvada Venugopalan ◽  
...  
Keyword(s):  
Interference Lithography ◽  
Plasmonic Nanostructures ◽  
Laser Interference Lithography ◽  
Uv Laser ◽  
Laser Interference

Fabrication of Nanostructured Hydrophobic Surfaces with Laser Interference Lithography

2013 ◽  
Vol 815 ◽  
pp. 457-464
Author(s):  
Hang Yu ◽  
Bing Rui Lu ◽  
Hui Li ◽  
Jian Ying Li ◽  
Ran Liu
Keyword(s):  
Periodic Structures ◽  
Low Cost ◽  
Substrate Surface ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Large Area ◽  
Complex Processes ◽  
Submicron Scale ◽  
Potential Applications

The fabrication of large area nanoscale periodic structures on material surfaces for hydrophobicity engineering has been difficult due to the complex processes. Here we propose a two-step fabrication method for periodic nanostructures by combining laser interference lithography (LIL) and reactive ion etching (RIE). Sub-micron periodic nanotip patterns are fabricated in the photoresist by LIL, and then transferred into the silicon substrate using RIE. By measuring the contact angle (CA) of a water droplet on the substrate surface, the wettability of the surface with nanotip structures of various periods is studied. Our experiments show that the nanotip structures fabricated by the combined LIL and RIE process deliver satisfactory hydrophobic tendencies when the periods fall into the submicron scale. When the period of the structure is small enough, the hydrophilicity of the surface can be altered into hydrophobicity. The hydrophobicity achieved by this method is reusable and sustainable with low cost and no composition alteration comparing to chemical methods. The process developed in this work provides potential applications in biosensingand digital fluidics.

Periodic patterning using multi-facet prism based laser interference lithography

Laser Physics ◽  
2009 ◽  
Vol 19 (3) ◽  
pp. 505-510 ◽  
Author(s):  
R. Sidharthan ◽  
F. Chollet ◽  
V. M. Murukeshan
Keyword(s):  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference

Theoretical study of micro-structure fabrication by multi-beam laser interference lithography with different polarization combinations

2021 ◽  
pp. 2150459
Author(s):  
Xiangxian Wang ◽  
Tianxu Jia ◽  
Jiankai Zhu ◽  
Yingwen Su ◽  
Liping Zhang ◽  
...  
Keyword(s):  
Manufacturing Industry ◽  
Structural Parameters ◽  
Interference Lithography ◽  
Polarization Angle ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Micro Structure ◽  
Periodic Patterns ◽  
Beam Laser ◽  
Micro Structures

In this study, we systematically and comprehensively investigated the influence of polarization angle on the fabrication of micro-structures by multi-beam laser interference lithography. Using theoretical analysis and simulation, we studied the effect of different polarization combinations, i.e. transverse electric (TE) and transverse magnetic (TM) polarization combinations, on the characteristics of the micro-structures fabricated by three-, four-, and six-beam laser interference lithography. We successfully obtained micro-structures with different periodic patterns such as honeycomb dots, quasi-elliptic dots, different square dots, and quasi-triangular dots. The simulation results illustrate that polarization affects the formation of interference patterns, pattern contrasts, and periods. The methods discussed herein are simple, low cost, and allow excellent control over structural parameters, and hence are useful for the micro-structure manufacturing industry.

High-power laser interference lithography process on photoresist: Effect of laser fluence and polarisation

2009 ◽  
Vol 255 (10) ◽  
pp. 5537-5541 ◽  
Author(s):  
M. Ellman ◽  
A. Rodríguez ◽  
N. Pérez ◽  
M. Echeverria ◽  
Y.K. Verevkin ◽  
...  
Keyword(s):  
High Power ◽  
Laser Fluence ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
High Power Laser ◽  
Laser Interference ◽  
Power Laser ◽  
Lithography Process

Formation of 300 nm period pore arrays by laser interference lithography and electrochemical etching

2015 ◽  
Vol 106 (5) ◽  
pp. 053107 ◽  
Author(s):  
J. Liu ◽  
P. Kleimann ◽  
G. Laffite ◽  
C. Jamois ◽  
R. Orobtchouk
Keyword(s):  
Electrochemical Etching ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference
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