Smart pixel camera based signal processing in an interferometric test station for massive parallel inspection of MEMS and MOEMS

Author(s):  
Adam Styk ◽  
Patrick Lambelet ◽  
Arne Røyset ◽  
Małgorzata Kujawińska ◽  
Kay Gastinger
1997 ◽  
Author(s):  
Barry L. Shoop ◽  
Andre H. Sayles ◽  
Glen P. Dudevoir ◽  
Dirk A. Hall ◽  
Daniel M. Litynski ◽  
...  

1999 ◽  
Vol 5 (2) ◽  
pp. 316-329 ◽  
Author(s):  
C.-H. Chen ◽  
B. Hoanca ◽  
C.B. Kuznia ◽  
A.A. Sawchuk ◽  
J.-M. Wu

1998 ◽  
Author(s):  
Dirk A. Hall ◽  
Barry L. Shoop ◽  
Robert W. Sadowski ◽  
Andre H. Sayles ◽  
Glen P. Dudevoir ◽  
...  

Author(s):  
Jean-Luc Starck ◽  
Fionn Murtagh ◽  
Jalal Fadili
Keyword(s):  

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