Phase demodulation method for fringe pattern in alignment of nanometer lithography

2010 ◽  
Author(s):  
Feng Xu ◽  
Song Hu ◽  
Zhengquan Luo ◽  
Shaolin Zhou
Keyword(s):  
Fringe Pattern ◽  
Demodulation Method ◽  
Phase Demodulation

Phase demodulation method from a single fringe pattern based on correlation with a polynomial form

2005 ◽  
Vol 44 (34) ◽  
pp. 7261 ◽  
Author(s):  
Eric Robin ◽  
Valéry Valle ◽  
Fabrice Brémand
Keyword(s):  
Fringe Pattern ◽  
Polynomial Form ◽  
Demodulation Method ◽  
Phase Demodulation

Phase Demodulation Using a Single Deformed Fringe Pattern by Wavelet Analysis

2012 ◽  
Vol 41 (10) ◽  
pp. 1211-1216 ◽  
Author(s):  
杨初平 YANG Chu-ping ◽  
翁嘉文 WENG Jia-wen ◽  
李海 LI Hai ◽  
谭穗妍 TAN Sui-yan
Keyword(s):  
Wavelet Analysis ◽  
Fringe Pattern ◽  
Phase Demodulation

Multi-harmonic phase demodulation method for instantaneous angular speed estimation using harmonic weighting

2022 ◽  
Vol 167 ◽  
pp. 108533
Author(s):  
Cédric Peeters ◽  
Jérôme Antoni ◽  
Quentin Leclère ◽  
Timothy Verstraeten ◽  
Jan Helsen
Keyword(s):  
Angular Speed ◽  
Speed Estimation ◽  
Harmonic Phase ◽  
Instantaneous Angular Speed ◽  
Demodulation Method ◽  
Phase Demodulation

Four-Step Spatial Quasi-Phase-Shifting Technique for Phase Demodulation from a Single Carrier Fringe Pattern

2017 ◽  
Vol 54 (1) ◽  
pp. 011203
Author(s):  
林锦新 Lin Jinxin ◽  
马 骁 Ma Xiao ◽  
李仕萍 Li Shiping ◽  
钟金钢 Zhong Jingang
Keyword(s):  
Fringe Pattern ◽  
Phase Shifting ◽  
Single Carrier ◽  
Phase Shifting Technique ◽  
Phase Demodulation
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