Periodic microstructures induced by interfered femtosecond laser pulses

2010 ◽  
Author(s):  
Zhongyi Guo ◽  
Shiliang Qu ◽  
Shutian Liu ◽  
Jung-Ho Lee
Keyword(s):  
Femtosecond Laser ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Periodic Microstructures

Formation of Nanovoids in Femtosecond Laser-Irradiated Single Crystals of Silicon Carbide

2012 ◽  
Vol 725 ◽  
pp. 19-22 ◽  
Author(s):  
Tatsuya Okada ◽  
Takuro Tomita ◽  
Shigeki Matsuo ◽  
Shuichi Hashimoto ◽  
Ryota Kashino ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Femtosecond Laser ◽  
Three Dimensional ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Formation Mechanisms ◽  
Strained Layers ◽  
Tomographic Images ◽  
Scanning Transmission ◽  
Periodic Microstructures

Scanning transmission electron microscopy was carried out to study the three-dimensional microstructures of periodic strained layers induced by the irradiation of femtosecond laser pulses inside a silicon carbide single crystal. The cross section of laser-irradiated line consisted of a shell-shaped modified region surrounding a core region with no modification. The laser-modified region was composed of strained layers with a typical spacing of 200 nm. Nanovoids from 10 nm to 20 nm in diameter were observed. Three-dimensional tomographic images clearly show the plate-like shape of strained layers extending parallel to the electric field of the laser light and the random distribution of nanovoids in the strained layers. The three-dimensional observation provides insight into the formation mechanisms of periodic microstructures.

Formation of extended periodic microstructures by “Point” irradiation of gold film by femtosecond laser pulses

JETP Letters ◽  
2008 ◽  
Vol 88 (4) ◽  
pp. 261-263
Author(s):  
B. N. Mironov ◽  
S. A. Aseev ◽  
V. S. Makin ◽  
S. V. Chekalin ◽  
V. S. Letokhov
Keyword(s):  
Femtosecond Laser ◽  
Gold Film ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Periodic Microstructures

Generation of periodic microstructures with femtosecond laser pulses

2002 ◽  
Author(s):  
Hans K. Toenshoff ◽  
Andreas Ostendorf ◽  
Frank Korte ◽  
J. Serbin ◽  
Thorsten Bauer
Keyword(s):  
Femtosecond Laser ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Periodic Microstructures

Inorganic-organic Hybrid Materials for Real 3-D Sub-νm Lithography

2003 ◽  
Vol 780 ◽  
Author(s):  
R. Houbertz ◽  
J. Schulz ◽  
L. Fröhlich ◽  
G. Domann ◽  
M. Popall ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Sol Gel ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Hybrid Polymer ◽  
Organic Hybrid ◽  
Two Photon ◽  
Applied Technology ◽  
Scale Structures ◽  
Sol Gel Synthesis

AbstractReal 3-D sub-νm lithography was performed with two-photon polymerization (2PP) using inorganic-organic hybrid polymer (ORMOCER®) resins. The hybrid polymers were synthesized by hydrolysis/polycondensation reactions (modified sol-gel synthesis) which allows one to tailor their material properties towards the respective applications, i.e., dielectrics, optics or passivation. Due to their photosensitive organic functionalities, ORMOCER®s can be patterned by conventional photo-lithography as well as by femtosecond laser pulses at 780 nm. This results in polymerized (solid) structures where the non-polymerized parts can be removed by conventional developers.ORMOCER® structures as small as 200 nm or even below were generated by 2PP of the resins using femtosecond laser pulses. It is demonstrated that ORMOCER®s have the potential to be used in components or devices built up by nm-scale structures such as, e.g., photonic crystals. Aspects of the materials in conjunction to the applied technology are discussed.

Ablation of metals with femtosecond laser pulses

2001 ◽  
Author(s):  
K. H. Leong ◽  
T. Y. Plew ◽  
R. L. Maynard ◽  
A. A. Said ◽  
L. A. Walker
Keyword(s):  
Femtosecond Laser ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses

Picosecond Single-Photon and Femtosecond Two-Photon Pulsed Laser Stimulation for IC Characterization and Failure Analysis

2009 ◽  
Author(s):  
V. Pouget ◽  
E. Faraud ◽  
K. Shao ◽  
S. Jonathas ◽  
D. Horain ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Single Photon ◽  
Pulsed Laser ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Ultrashort Laser Pulses ◽  
Laser Stimulation ◽  
Two Photon ◽  
Resolution Improvement ◽  
Ultrashort Laser

Abstract This paper presents the use of pulsed laser stimulation with picosecond and femtosecond laser pulses. We first discuss the resolution improvement that can be expected when using ultrashort laser pulses. Two case studies are then presented to illustrate the possibilities of the pulsed laser photoelectric stimulation in picosecond single-photon and femtosecond two-photon modes.

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