Proximity effect correction concerning forward scattering

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Keyword(s):  
Proximity Effect ◽  
Forward Scattering ◽  
Proximity Effect Correction

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Takuya Mitarai ◽  
Tomohiro Amemiya ◽  
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Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
Electron Beam Lithography ◽  
Photonic Waveguides ◽  
Proximity Effect Correction

Proximity effect correction for reticle fabrication

2000 ◽  
Author(s):  
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Shinji Kubo ◽  
Koji Hiruta ◽  
Takayuki Iwamatsu ◽  
Tatsuya Fujisawa ◽  
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Keyword(s):  
Proximity Effect ◽  
Proximity Effect Correction

Proximity effect correction by the GHOST method using a scattering stencil mask

1999 ◽  
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pp. 2860 ◽  
Author(s):  
Hiroshi Yamashita ◽  
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Shoko Manako ◽  
Hideo Kobinata ◽  
Ken Nakajima ◽  
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Keyword(s):  
Proximity Effect ◽  
Stencil Mask ◽  
Proximity Effect Correction

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2021 ◽  
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Xuetong Sun ◽  
Yang Zhang ◽  
Po-Chun Huang ◽  
Niloy Acharjee ◽  
Mario Dagenais ◽  
...  
Keyword(s):  
Proximity Effect ◽  
Phased Arrays ◽  
Proximity Effect Correction
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