Comparison of optical surface roughness measured by stylus profiler, AFM, and white light interferometer using power spectral density
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2006 ◽
Vol 532-533
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pp. 697-700
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2009 ◽
Vol 256
(2)
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pp. 558-561
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2010 ◽
Vol 97-101
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pp. 4080-4083
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1992 ◽
Vol 29
(4-5)
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pp. 477-486
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