Fabrication and simulation of large-scale MEMS deformable mirror for wave front active control
2011 ◽
Vol 158
(7)
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pp. 1391-1403
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2000 ◽
Vol 17
(5)
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pp. 911
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1986 ◽
Vol 120
(1)
◽
pp. 13-24
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Keyword(s):
2013 ◽
Vol 2013.62
(0)
◽
pp. 183-184
2002 ◽
Vol 19
(9)
◽
pp. 1817
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Keyword(s):