Characterizing Si x N y absorbers and support beams for far-infrared/submillimeter transition-edge sensors
Keyword(s):
Keyword(s):
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2004 ◽
Vol 520
(1-3)
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pp. 348-350
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2009 ◽
Vol 19
(3)
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pp. 445-450
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2006 ◽
Vol 559
(2)
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pp. 715-717
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2013 ◽
Vol 176
(3-4)
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pp. 168-175
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