In situ control of roughness of processed surfaces by reflectometric method
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
1983 ◽
Vol 20
(2)
◽
pp. A48-A49
2018 ◽
Vol 122
(36)
◽
pp. 20888-20893
◽
2019 ◽
Vol 6
(19)
◽
pp. 1901032
◽