Centimeter-long microfluidic channel with an aspect ratio above 1,000 directly fabricated in fused silica by femtosecond laser micromachining

2010 ◽  
Author(s):  
Fei He ◽  
Ya Cheng ◽  
Zhizhan Xu ◽  
Koji Sugioka ◽  
Katsumi Midorikawa
Keyword(s):  
Aspect Ratio ◽  
Femtosecond Laser ◽  
Microfluidic Channel ◽  
Laser Micromachining ◽  
Fused Silica ◽  
Femtosecond Laser Micromachining

scholarly journals Femtosecond Laser Micromachining of an Optofluidics-based Monolithic Whispering-Gallery Mode Resonator Coupled to a Suspended Waveguide

2021 ◽  
Author(s):  
João M. Maia ◽  
Vítor A. Amorim ◽  
Duarte Viveiros ◽  
P. V. S. Marques
Keyword(s):  
Refractive Index ◽  
Femtosecond Laser ◽  
Microfluidic Channel ◽  
Laser Micromachining ◽  
Measurement Range ◽  
Fused Silica ◽  
Q Factor ◽  
Label Free ◽  
Whispering Gallery ◽  
Femtosecond Laser Micromachining

Abstract A monolithic lab-on-a-chip fabricated by femtosecond laser micromachining capable of label-free biosensing is reported. The device is entirely made of fused silica, and consists of a microdisk resonator integrated inside a microfluidic channel. Whispering gallery modes are excited by the evanescent field of a circular suspended waveguide, also incorporated within the channel. Thermal annealing is performed to decrease the surface roughness of the microstructures to a nanometric scale, thereby reducing intrinsic losses and maximizing the Q-factor. Further, it is used to position, with submicrometric precision, the waveguide tangent to the resonator and within the critical coupling regime. With this fabrication method and geometry, the alignment between the waveguide and the resonator is robust and guaranteed at all instances. A maximum sensitivity of 121.5 nm/RIU was obtained at a refractive index of 1.363, whereas near the refractive index range of water-based solutions the sensitivity is 40 nm/RIU. A high Q-factor of 105 is kept throughout the entire measurement range.

scholarly journals Femtosecond laser micromachining of an optofluidics-based monolithic whispering-gallery mode resonator coupled to a suspended waveguide

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
João M. Maia ◽  
Vítor A. Amorim ◽  
Duarte Viveiros ◽  
P. V. S. Marques
Keyword(s):  
Refractive Index ◽  
Femtosecond Laser ◽  
Microfluidic Channel ◽  
Laser Micromachining ◽  
Fused Silica ◽  
Evanescent Field ◽  
Q Factor ◽  
Label Free ◽  
Whispering Gallery ◽  
Femtosecond Laser Micromachining

AbstractA monolithic lab-on-a-chip fabricated by femtosecond laser micromachining capable of label-free biosensing is reported. The device is entirely made of fused silica, and consists of a microdisk resonator integrated inside a microfluidic channel. Whispering gallery modes are excited by the evanescent field of a circular suspended waveguide, also incorporated within the channel. Thermal annealing is performed to decrease the surface roughness of the microstructures to a nanometric scale, thereby reducing intrinsic losses and maximizing the Q-factor. Further, thermally-induced morphing is used to position, with submicrometric precision, the suspended waveguide tangent to the microresonator to enhance the spatial overlap between the evanescent field of both optical modes. With this fabrication method and geometry, the alignment between the waveguide and the resonator is robust and guaranteed at all instances. A maximum sensitivity of 121.5 nm/RIU was obtained at a refractive index of 1.363, whereas near the refractive index range of water-based solutions the sensitivity is 40 nm/RIU. A high Q-factor of 105 is kept throughout the entire measurement range.

scholarly journals Optimization of femtosecond laser cutting of biodegradable polymer for medical devices manufacturing

2016 ◽  
Vol 8 (4) ◽  
pp. 116 ◽  
Author(s):  
Bogusz Stepak ◽  
Arkadiusz J. Antonczak ◽  
Krzysztof M. Abramski
Keyword(s):  
Aspect Ratio ◽  
Femtosecond Laser ◽  
Medical Devices ◽  
Biodegradable Polymer ◽  
High Aspect Ratio ◽  
Laser Cutting ◽  
Laser Micromachining ◽  
Scanning Strategy ◽  
Vascular Stents ◽  
Femtosecond Laser Micromachining

This paper describes the experimental parameters involved in the femtosecond laser micromachining of biodegradable poly(L-lactide) which is frequently used in biomedical applications such as vascular stents or scaffolds. We investigated the influence of laser pulse energy, scanning strategy and number of overscans on the laser cutting throughput. The process parameters that enable reducing of a heat affected zone were determined. As a result, the optimal scanning strategy was determined in order to obtain high aspect ratio trenches in 380 ?m thick biodegradable polymer sheet. Full Text: PDF ReferencesW. Jia et al. "Effects of high-repetition-rate femtosecond laser micromachining on the physical and chemical properties of polylactide (PLA)", Opt. Express 23, 21 (2015). CrossRef F. Hendricks, R. Patel, and V.V. Matylistsky, "Micromachining of bio-absorbable stents with ultra-short pulse lasers", Proc. SPIE 9355, 935502 (2015). CrossRef W.Y. Yeong et al. "Annealing of Biodegradable Polymer Induced by Femtosecond Laser Micromachining", Adv. Eng. Mater. 4, 12 (2010). CrossRef K. Stolberg et al. "IR and green femtosecond laser machining of heat sensitive materials for medical devices at micrometer scale", Proc. SPIE 8968, 89680E (2014). CrossRef F. Hendricks et al. "High aspect ratio microstructuring of transparent dielectrics using femtosecond laser pulses: method for optimization of the machining throughput", Appl. Phys. A 117, 1 (2014). CrossRef A. Antonczak et al. "Degradation of poly(l-lactide) under CO2 laser treatment above the ablation threshold", Polym. Deg. Stab. 109, 97-105 (2014) CrossRef B. Stepak et al. "The influence of ArF excimer laser micromachining on physicochemical properties of bioresorbable poly(L-lactide)", Proc SPIE 9736, 97361T (2016). CrossRef

scholarly journals Femtosecond laser micromachining of fused silica molds

2010 ◽  
Vol 18 (21) ◽  
pp. 21826 ◽  
Author(s):  
Frédéric Madani-Grasset ◽  
Yves Bellouard
Keyword(s):  
Femtosecond Laser ◽  
Laser Micromachining ◽  
Fused Silica ◽  
Femtosecond Laser Micromachining

scholarly journals High-order harmonic generation in femtosecond laser micromachined devices

2019 ◽  
Vol 205 ◽  
pp. 02007
Author(s):  
Anna G. Ciriolo ◽  
Rebeca Martínez Vázquez ◽  
Gabriele Crippa ◽  
Davide Faccialà ◽  
Matteo Negro ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Harmonic Generation ◽  
Large Scale ◽  
Laser Micromachining ◽  
Fused Silica ◽  
High Order ◽  
High Order Harmonic Generation ◽  
High Order Harmonic ◽  
Femtosecond Laser Micromachining ◽  
The Way

We demonstrate the generation of high-order harmonics in a fused-silica device fabricated through femtosecond laser micromachining. This achievement paves the way for the miniaturization of HHG applications from large-scale laboratories to microstructures.

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