Effect of surface treatments/coatings and soft bake profile on surface uniformity and adhesion of SU-8 on a glass substrate
2011 ◽
Vol 49
(01)
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pp. 25-31
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Keyword(s):
2016 ◽
Vol 116
(5)
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pp. 797-802
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2010 ◽
Vol 35
(3)
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pp. 173
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2004 ◽
Vol 12
(1)
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pp. 45-50
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2012 ◽
Vol 75
(9)
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pp. 1206-1212
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2016 ◽
Vol 17
(11)
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pp. 920-925
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2012 ◽
Vol 15
(4)
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pp. 383
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2009 ◽
Vol 29
(6)
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pp. 662-669
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