Dry etching of TiO 2 /SiO 2 DBR mirrors for tunable optical sensor arrays
2010 ◽
Vol 9
(4)
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pp. 041110
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Keyword(s):
2021 ◽
Vol 3
(2)
◽
pp. 506-530
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2009 ◽
Vol 56
(3)
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pp. 1069-1075
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Keyword(s):
2019 ◽
Vol 10
◽
pp. 22-29
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