Influence of partially coherent illumination on aerial-image-based aberration measurement of projection optics in lithographic tools

2009 ◽  
Author(s):  
Tingting Zhou ◽  
Shiyuan Liu ◽  
Wei Liu ◽  
Lijuan Wang
Keyword(s):  
Aerial Image ◽  
Partially Coherent ◽  
Coherent Illumination ◽  
Projection Optics

scholarly journals Optimization analysis of partially coherent illumination for refractive index tomographic microscopy

2021 ◽  
Vol 143 ◽  
pp. 106624
Author(s):  
Jiaji Li ◽  
Ning Zhou ◽  
Zhidong Bai ◽  
Shun Zhou ◽  
Qian Chen ◽  
...  
Keyword(s):  
Refractive Index ◽  
Optimization Analysis ◽  
Partially Coherent ◽  
Coherent Illumination

Holography with partially coherent illumination

1969 ◽  
Vol 28 (9) ◽  
pp. 623-624 ◽  
Author(s):  
W. Mirandé ◽  
I. Weingärtner
Keyword(s):  
Partially Coherent ◽  
Coherent Illumination

Experimental analysis and designing strategies of lens-less microscopy with partially coherent illumination

2019 ◽  
Vol 434 ◽  
pp. 136-144 ◽  
Author(s):  
Yinxu Bian ◽  
Wensheng Wang ◽  
Anwar Hussian ◽  
Cuifang Kuang ◽  
Haifeng Li ◽  
...  
Keyword(s):  
Experimental Analysis ◽  
Partially Coherent ◽  
Coherent Illumination

Measuring the Complex Amplitude of Wave Fields by Means of Phase Retrieval Using Partially Coherent Illumination

Fringe 2013 ◽  
2014 ◽  
pp. 283-287
Author(s):  
Mostafa Agour ◽  
Khaled Elshaffey ◽  
Christoph von Kopylow ◽  
Ralf B. Bergmann ◽  
Claas Falldorf
Keyword(s):  
Phase Retrieval ◽  
Complex Amplitude ◽  
Wave Fields ◽  
Partially Coherent ◽  
Coherent Illumination

Trefoil Aberration Measurement of Lithographic Projection Optics Based on Linewidth Asymmetry of the Aerial Image

2019 ◽  
Vol 18 (1) ◽  
pp. 373-379
Author(s):  
Qiongyan Yuan ◽  
Xiangzhao Wang ◽  
Zicheng Qiu
Keyword(s):  
Aerial Image ◽  
Projection Optics

scholarly journals Label‐free bioanalysis of Leishmania infantum using refractive index tomography with partially coherent illumination

2019 ◽  
Vol 12 (9) ◽  
Author(s):  
Juan M. Soto ◽  
Alicia Mas ◽  
José A. Rodrigo ◽  
Tatiana Alieva ◽  
Gustavo Domínguez‐Bernal
Keyword(s):  
Refractive Index ◽  
Leishmania Infantum ◽  
Label Free ◽  
Partially Coherent ◽  
Coherent Illumination

Microscopic phase reconstruction of cervical exfoliated cell under partially coherent illumination

2020 ◽  
Vol 14 (1) ◽  
Author(s):  
Xingyuan Lu ◽  
Zhuoyi Wang ◽  
Suxia Zhang ◽  
A. P. Konijnenberg ◽  
Yiqin Ouyang ◽  
...  
Keyword(s):  
Phase Reconstruction ◽  
Partially Coherent ◽  
Coherent Illumination

Near field hologram registration with partially coherent illumination

2004 ◽  
Vol 237 (4-6) ◽  
pp. 235-242 ◽  
Author(s):  
Tomasz Kozacki ◽  
Romuald Jóźwicki
Keyword(s):  
Near Field ◽  
Partially Coherent ◽  
Coherent Illumination
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