Fabrication of microlens arrays on a glass substrate by roll-to-roll process with PDMS mold

2009 ◽  
Author(s):  
Chia-Nying Hu ◽  
Guo-Dung J. Su
Keyword(s):  
Glass Substrate ◽  
Pdms Mold ◽  
Microlens Arrays ◽  
Roll To Roll

A Microlens Array with Different Focal Lengths Fabricated by Roll-To-Roll UV Lithography

2018 ◽  
Vol 26 (2) ◽  
pp. 155-159
Author(s):  
Huichun Ye ◽  
Lianguan Shen ◽  
Mujun Li ◽  
Likai Li
Keyword(s):  
Optical Properties ◽  
Low Cost ◽  
Microlens Array ◽  
Master Mold ◽  
Pdms Mold ◽  
Microlens Arrays ◽  
Array Pattern ◽  
Roll To Roll ◽  
Ultra Precision ◽  
Micro Structures

A simple, highly efficient and low cost roll-to-roll (R2R) UV imprinting lithography facility was achieved for fabricating micro-structures. Firstly, a novel microlens array with focuses distributed on a curved surface was designed and analyzed by an optical software ZEMAX. Then an ultra-precision diamond machine was applied to generate the freeform microlens array features on the master mold, and a belt-type polydimethylsiloxane (PDMS) mold with a microlens array pattern was prepared from the machined master mold. The R2R process was employed to replicate the microlens arrays, followed by an evaluation of their profiles and optical properties. Our experiments demonstrate that the applied method is reliable and efficient for producing the polymeric microlens arrays.

Thermal Reflow Process for Glass Microlens Manufacturing

2008 ◽  
Author(s):  
Yang Chen ◽  
Allen Y. Yi ◽  
Donggan Yao ◽  
Fritz Klocke ◽  
Guido Pongs
Keyword(s):  
Numerical Simulation ◽  
Glassy Carbon ◽  
Glass Substrate ◽  
Simulation Method ◽  
Compression Molding ◽  
Fabrication Process ◽  
Holding Time ◽  
Reflow Process ◽  
Microlens Arrays ◽  
Thermal Reflow

This fabrication process includes three major steps, i.e., fabrication of glassy carbon molds with arrays of micro size holes, glass compression molding to create micro cylinders on glass substrate, and reheating to form microlens arrays. As compared to traditional polymer microlens arrays, glass microlens arrays are more reliable and therefore could be used in more critical applications. In this research, microlens arrays with different surface geometries were successfully fabricated on P-SK57 (Tg = 493 °C) glass substrate using a combination of compression molding and thermal reflow process. The major parameters that influence the final lens shape, including reheating temperature and holding time, were studied to establish a suitable fabrication process. A numerical simulation method was developed to evaluate the fabrication process.

PDMS Microlens Arrays Fabrication Method Based-on Parylene C Lift-Off

2009 ◽  
Vol 60-61 ◽  
pp. 343-346
Author(s):  
Jian Hua Tong ◽  
Yu Sun
Keyword(s):  
Glass Substrate ◽  
Pdms Membrane ◽  
Optical Data ◽  
Fabrication Method ◽  
Parylene C ◽  
Microscopy Imaging ◽  
Microlens Arrays ◽  
Lift Off

Microlenses are important components in optical data interconnects and MEMS-based microscopy imaging. Several microfabrication processes have been developed for the production of microlens arrays. However, assembly of microlens arrays is usually required. In this paper, we demonstrate the application of PDMS membrane patterning based on parylene C lift-off to the construction of PDMS microlens arrays on a glass substrate without an assembly step.

Dual-Mode Liquid Crystal Microlens Arrays for Chaotic Encryption

2016 ◽  
Vol 26 (12) ◽  
pp. 1650209 ◽  
Author(s):  
Di Fan ◽  
Cheng Wang ◽  
Qing Tong ◽  
Yu Lei ◽  
Xinyu Zhang ◽  
...  
Keyword(s):  
Liquid Crystal ◽  
Indium Tin Oxide ◽  
Glass Substrate ◽  
Optical Modulator ◽  
Driving Voltage ◽  
Chaotic Encryption ◽  
Dual Mode ◽  
Microlens Arrays ◽  
Glass Substrates ◽  
New Type

Based on our previous works on liquid crystal (LC) microlenses driven electrically, we present a new type of dual-mode liquid crystal microlens arrays (DLCMAs) for chaotic encryption applications. Currently, the DLCMAs developed by us consist of a top electrode couple constructed by two layers of controlling electrode and a bottom planar electrode. Aluminium and Indium-Tin Oxide (ITO) materials are respectively deposited over both sides of a glass substrate for shaping the top electrode couple, which is used to act as a key mode-control-part in the DLCMAs. Another ITO layer is deposited over the surface of another glass substrate for shaping the bottom public electrode. Both glass substrates with fabricated electrode structures are coupled into a microcavity fully filled by a layer of nematic liquid crystal materials. The DLCMAs proposed in this paper present excellent beam divergence and light convergence performances through loading relatively low driving voltage signals. The common optical properties of the devices, leading to a type of optical modulator of chaotic beams or light intensity adjustment devices for chaotic light coupling between functioned components, are demonstrated experimentally.

Fabrication of high integrated microlens arrays on a glass substrate for 3D micro-optical systems

2018 ◽  
Vol 457 ◽  
pp. 1202-1207 ◽  
Author(s):  
Yang Wei ◽  
Qing Yang ◽  
Hao Bian ◽  
Feng Chen ◽  
Minjing Li ◽  
...  
Keyword(s):  
Glass Substrate ◽  
Optical Systems ◽  
Microlens Arrays

Benzylamine Tartrate as an Organic Glass Substrate for Carbon Films by Evaporation

1970 ◽  
Vol 28 ◽  
pp. 484-485
Author(s):  
A. C. Faberge
Keyword(s):  
Vapor Pressure ◽  
Viscous Liquid ◽  
Glass Substrate ◽  
Room Temperature ◽  
Carbon Film ◽  
Carbon Films ◽  
Organic Glass ◽  
Spectroscopic Examination ◽  
Polymeric Substrates

Benzylamine tartrate (m.p. 63°C) seems to be a better and more convenient substrate for making carbon films than any of those previously proposed. Using it in the manner described, it is easy consistently to make batches of specimen grids as open as 200 mesh with no broken squares, and without individual handling of the grids. Benzylamine tartrate (hereafter called B.T.) is a viscous liquid when molten, which sets to a glass. Unlike polymeric substrates it does not swell before dissolving; such swelling of the substrate seems to be a principal cause of breakage of carbon film. Mass spectroscopic examination indicates a vapor pressure less than 10−9 Torr at room temperature.

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