Optical properties of amorphous silicon thin films fabricated by RF magnetron sputtering

2008 ◽  
Author(s):  
Benfeng Liu ◽  
Qingnan Zhao ◽  
Pan Zheng
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Amorphous Silicon ◽  
Rf Magnetron Sputtering ◽  
Silicon Thin Films

Effect of Nitrogen Doping on the Structure and Optical Properties of N-Type Hydrogenated Amorphous Silicon Thin Films

2011 ◽  
Vol 383-390 ◽  
pp. 6980-6985
Author(s):  
Mao Yang Wu ◽  
Wei Li ◽  
Jun Wei Fu ◽  
Yi Jiao Qiu ◽  
Ya Dong Jiang
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Amorphous Silicon ◽  
Photoelectron Spectroscopy ◽  
Gas Flow ◽  
Hydrogenated Amorphous Silicon ◽  
Chemical Vapor ◽  
Silicon Thin Films ◽  
Frequency Plasma ◽  
Hydrogenated Amorphous

Hydrogenated amorphous silicon (a-Si:H) thin films doped with both Phosphor and Nitrogen are deposited by ratio frequency plasma enhanced chemical vapor deposition (PECVD). The effect of gas flow rate of ammonia (FrNH3) on the composition, microstructure and optical properties of the films has been investigated by X-ray photoelectron spectroscopy, Raman spectroscopy and ellipsometric spectra, respectively. The results show that with the increase of FrNH3, Si-N bonds appear while the short-range order deteriorate in the films. Besides, the optical properties of N-doped n-type a-Si:H thin films can be easily controlled in a PECVD system.

B-Doped Amorphous Silicon Thin Films Deposited on Flexible PET Substrate by Magnetron Sputtering

2015 ◽  
Vol 12 (9) ◽  
pp. 2931-2936 ◽  
Author(s):  
Kun Liu ◽  
Shulei Chen ◽  
Dechun Ba ◽  
Dongyang Wang ◽  
Yashuai Ba ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Amorphous Silicon ◽  
Silicon Thin Films ◽  
Pet Substrate

A New General Method for the Determination of Optical Properties of Amorphous Silicon Films

1990 ◽  
Vol 192 ◽  
Author(s):  
G. Amato ◽  
L. Boarino ◽  
F. Fizzotti ◽  
C. Manfredotti
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Amorphous Silicon ◽  
Optical Response ◽  
The Other ◽  
New Method ◽  
Silicon Thin Films ◽  
Physical Insight ◽  
General Method

ABSTRACTWe propose to apply a new method to model the optical response of amorphous silicon thin films. This method presents the advantage of having a good physical insight. On the other hand, although the model has been originally tested on different materials like a-Si, a-Ge and a-GaAs, we show that it is also sensitive to small differences like those that can exist between intrinsic and doped a-Si:H.

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