Synchrotron white beam transmission topography of GaAs as previously reported by the authors relied on scanning specimen and film synchronously through the incident x-ray beam to record transmission topographic images en film. Sometimes the total dose required for reasonable contrast on film carried with it enough thermal deposition to cause elastic warping of the wafer. To escape these problems, a real time system was assembled. This system included an image intensifier, a solid state camera, a computer board to frame-grab and digitize images, and appropriate image processing software. With this system, a three inch specimen was scanned from edge to edge in one minute. At this scan rate, the incident x-ray beam had to be significantly attenuated to avoid saturating the intensifier output.
Real time implementation of distortion corrections for a tiled EMCCD-based solid state x-ray image intensifier (SSXII)