Pattern transfer process development for EUVL

2009 ◽  
Author(s):  
Daisuke Kawamura ◽  
Yuusuke Tanaka ◽  
Toshiro Itani ◽  
Eiichi Soda ◽  
Noriaki Oda
Keyword(s):  
Transfer Process ◽  
Process Development ◽  
Pattern Transfer

A novel pattern transfer process for bonded SOI giga-bit DRAMs

2002 ◽  
Author(s):  
B.H. Lee ◽  
G.J. Bae ◽  
K.W. Lee ◽  
G. Cha ◽  
W.D. Kim ◽  
...  
Keyword(s):  
Transfer Process ◽  
Pattern Transfer

Development of a robust reverse tone pattern transfer process

2017 ◽  
Author(s):  
Niyaz Khusnatdinov ◽  
Gary Doyle ◽  
Douglas J. Resnick ◽  
Zhengmao Ye ◽  
Dwayne LaBrake ◽  
...  
Keyword(s):  
Transfer Process ◽  
Pattern Transfer ◽  
Tone Pattern

Application of Organic Silicon Clusters to Pattern Transfer Process for Deep UV Lithography

2000 ◽  
Vol 39 (Part 1, No. 12B) ◽  
pp. 6781-6785 ◽  
Author(s):  
Yasuhiko Sato ◽  
Eishi Shiobara ◽  
Junko Abe ◽  
Yasunobu Onishi ◽  
Sawako Yoshikawa ◽  
...  
Keyword(s):  
Transfer Process ◽  
Pattern Transfer ◽  
Silicon Clusters ◽  
Organic Silicon ◽  
Uv Lithography ◽  
Deep Uv

Polydimethylsiloxane-based pattern transfer process for the post-IC integration of MEMS onto CMOS chips

2003 ◽  
Vol 14 (3) ◽  
pp. 335-340 ◽  
Author(s):  
Daniel Sang-Won Park ◽  
Kabseog Kim ◽  
Brandon Pillans ◽  
Jeong-Bong Lee
Keyword(s):  
Transfer Process ◽  
Pattern Transfer

Advances in resist pattern transfer process using 157-nm lithography

2004 ◽  
Author(s):  
Takamitsu Furukawa ◽  
Takuya Hagiwara ◽  
Etsurou Kawaguchi ◽  
Kentaro Matsunaga ◽  
Toshifumi Suganaga ◽  
...  
Keyword(s):  
Transfer Process ◽  
Pattern Transfer

Layer Transfer Process Development For SiGe Based Microbolometer Integration

2020 ◽  
Author(s):  
Canan Baristiran Kaynak ◽  
Alexander Goeritz ◽  
Patrick Krueger ◽  
Thomas Voss ◽  
Yuji Yamamoto ◽  
...  
Keyword(s):  
Transfer Process ◽  
Process Development ◽  
Layer Transfer
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