Phase-shifting interferometry is widely used because it can measure phase with high accuracy. Changing optical path length with a PZT transducer and changing frequency of the optical source with a laser diode (LD) are two common methods to apply the desired phase shift between the arms in the interferometer. In any case, however, it is not easy to apply the desired shift accurately, and if not, measurement errors occur. In order to reduce the errors, the effect of the phase shift error has been analyzed numerically especially in the case with LD.
The simultaneous suppression of phase shift error and harmonics in the phase shifting interferometry using carrier squeezing interferometry