Analysis of hydrogen exposure effects on the transmittance of periodic sub-wavelength palladium hole arrays

2009 ◽  
Author(s):  
Etsuo Maeda ◽  
Koichi Endo ◽  
Sho Mikuriya ◽  
Masaki Shuzo ◽  
Ichiro Yamada ◽  
...  
Keyword(s):  
Hydrogen Exposure ◽  
Hole Arrays ◽  
Sub Wavelength

scholarly journals A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology

Sensors ◽  
2020 ◽  
Vol 21 (1) ◽  
pp. 180
Author(s):  
Chi-Feng Chen ◽  
Chih-Hsiung Shen ◽  
Yun-Ying Yeh
Keyword(s):  
Fdtd Method ◽  
Elliptical Hole ◽  
Oxide Semiconductor ◽  
Active Area ◽  
Hole Array ◽  
Cmos Mems ◽  
Simulation Results ◽  
Hole Arrays ◽  
Hole Structure ◽  
Sub Wavelength

A thermopile device with sub-wavelength hole array (SHA) is numerically and experimentally investigated. The infrared absorbance (IRA) effect of SHAs in active area of the thermopile device is clearly analyzed by the finite-difference time-domain (FDTD) method. The prototypes are manufactured by the 0.35 μm 2P4M complementary metal-oxide-semiconductor micro-electro-mechanical-systems (CMOS-MEMS) process in Taiwan semiconductor manufacturing company (TSMC). The measurement results of those prototypes are similar to their simulation results. Based on the simulation technology, more sub-wavelength hole structural effects for IRA of such thermopile device are discussed. It is found from simulation results that the results of SHAs arranged in a hexagonal shape are significantly better than the results of SHAs arranged in a square and the infrared absorption efficiencies (IAEs) of specific asymmetric rectangle and elliptical hole structure arrays are higher than the relatively symmetric square and circular hole structure arrays. The overall best results are respectively up to 3.532 and 3.573 times higher than that without sub-wavelength structure at the target temperature of 60 °C when the minimum structure line width limit of the process is ignored. Obviously, the IRA can be enhanced when the SHAs are considered in active area of the thermopile device and the structural optimization of the SHAs is absolutely necessary.

Multi-color and multidirectional-steerable Smith-Purcell radiation from 2D sub-wavelength hole arrays

2018 ◽  
Vol 113 (1) ◽  
pp. 013501 ◽  
Author(s):  
Linbo Liang ◽  
Weihao Liu ◽  
Yucheng Liu ◽  
Qika Jia ◽  
Lin Wang ◽  
...  
Keyword(s):  
Hole Arrays ◽  
Sub Wavelength

Theory of extraordinary light transmission through sub-wavelength circular hole arrays

2009 ◽  
Vol 12 (1) ◽  
pp. 015004 ◽  
Author(s):  
Meng Zhang ◽  
Cheng-ping Huang ◽  
Guo-dong Wang ◽  
Yong-yuan Zhu
Keyword(s):  
Circular Hole ◽  
Light Transmission ◽  
Hole Arrays ◽  
Sub Wavelength

Optical properties of sub-wavelength hole arrays in SiC membranes

2007 ◽  
Vol 9 (9) ◽  
pp. S322-S333 ◽  
Author(s):  
Y A Urzhumov ◽  
D Korobkin ◽  
B Neuner III ◽  
C Zorman ◽  
G Shvets
Keyword(s):  
Optical Properties ◽  
Hole Arrays ◽  
Sub Wavelength

Extraordinary Transmission Based on Deep Perforated Sub-Wavelength Metallic Hole Arrays for Infrared Photodetector

2013 ◽  
Vol 10 (9) ◽  
pp. 2131-2135
Author(s):  
Lechen Yang ◽  
Xiuli Zhou ◽  
Dong Liu ◽  
Haijun Li Kai Fu ◽  
Min Xiong ◽  
...  
Keyword(s):  
Infrared Photodetector ◽  
Extraordinary Transmission ◽  
Hole Arrays ◽  
Sub Wavelength

Localised modes of sub-wavelength hole arrays in thin metal films

2008 ◽  
Author(s):  
J. Parsons ◽  
E. Hendry ◽  
B. Auguié ◽  
W. L. Barnes ◽  
J. R. Sambles
Keyword(s):  
Metal Films ◽  
Thin Metal ◽  
Thin Metal Films ◽  
Hole Arrays ◽  
Sub Wavelength
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