Novel process proximity correction by the pattern-to-pattern matching method with DBM
2016 ◽
Vol 136
(6)
◽
pp. 418-424
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Keyword(s):
2016 ◽
Vol 12
(4)
◽
pp. 21-44
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2003 ◽
Vol 24
(2)
◽
pp. 449-466
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2006 ◽
Vol 05
(04)
◽
pp. 337-343
1997 ◽
Vol 9
(2)
◽
pp. 126-131
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Keyword(s):