Single-layer and multilayer mirrors for current and next-generation light sources

2008 ◽  
Author(s):  
Michael Störmer ◽  
Christian Horstmann ◽  
Dietrich Häussler ◽  
Erdmann Spiecker ◽  
Frank Siewert ◽  
...  
Keyword(s):  
Single Layer ◽  
Light Sources ◽  
Next Generation ◽  
Multilayer Mirrors

Study of Single Layer Thermal Oxide as Inter-Poly Dielectric for Next Generation Flash Memory

1994 ◽  
Author(s):  
N. Shinmura ◽  
S. Sato ◽  
K. Hakozaki ◽  
K. Azuma ◽  
K. Iguchi ◽  
...  
Keyword(s):  
Flash Memory ◽  
Single Layer ◽  
Next Generation ◽  
Thermal Oxide

Thermal stability of B-based multilayer mirrors for next generation lithography

2017 ◽  
Vol 642 ◽  
pp. 252-257
Author(s):  
P. Naujok ◽  
K. Murray ◽  
S. Yulin ◽  
C. Patzig ◽  
N. Kaiser ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Next Generation ◽  
Multilayer Mirrors ◽  
Next Generation Lithography ◽  
Thermal Stability Of

Towards efficient next generation light sources: combined solution processed and evaporated layers for OLEDs

2010 ◽  
Author(s):  
D. Hartmann ◽  
W. Sarfert ◽  
S. Meier ◽  
H. Bolink ◽  
S. García Santamaría ◽  
...  
Keyword(s):  
Light Sources ◽  
Next Generation ◽  
Solution Processed ◽  
Combined Solution

Importance of the Photoeffects in Rapid Isothermal Processing (RIP)

1994 ◽  
Vol 342 ◽  
Author(s):  
R. Singh ◽  
J. Mavoori ◽  
R. P. S. Thakur ◽  
S. Narayanan
Keyword(s):  
Processing Time ◽  
Radiation Spectrum ◽  
Light Sources ◽  
Next Generation ◽  
Incoherent Light ◽  
Thermal Budget ◽  
Conventional Furnace ◽  
Fundamental Understanding ◽  
Lower Temperature ◽  
Rapid Isothermal Processing

ABSTRACTThere are fundamental differences between conventional furnace processing (CFP) and rapid isothermal processing (RIP). The radiation spectrum of a conventional furnace consists of photons in the infrared and longer wavelength regions, whereas the spectrum of the incoherent light sources used in RIP consist of some ultraviolet, visible, and infrared photons. As compared to CFP, the photophysical and photochemical effects associated with RIP provide the capability of lower temperature processing. Due to photoeffects in RIP, differences are observed in junction movement and defect evolution with different lamp configurations and different kinds of lamps having differing spectra. This implies that diffusion models, in addition to considering processing time and temperature, should also account for the lamp configurations and spectra of the heating sources. The fundamental understanding of photoeffects in RIP can be further exploited to reduce the overall thermal budget used in the manufacturing of semiconductor devices. In this paper we present our study of photoeffects in RIP, which can be of help in the design of the next generation of RIP equipment.

Single-layer mirrors for advanced research light sources

2010 ◽  
Author(s):  
M. Störmer ◽  
C. Horstmann ◽  
F. Siewert ◽  
F. Scholze ◽  
M. Krumrey ◽  
...  
Keyword(s):  
Single Layer ◽  
Light Sources

scholarly journals Development of contamination-free x-ray optics for next-generation light sources

2016 ◽  
Author(s):  
Haruhiko Ohashi ◽  
Yasunori Senba ◽  
Hirokatsu Yumoto ◽  
Takahisa Koyama ◽  
Takanori Miura ◽  
...  
Keyword(s):  
Light Sources ◽  
Next Generation ◽  
Ray Optics ◽  
X Ray

Storage Ring Light Sources

2010 ◽  
Vol 03 (01) ◽  
pp. 57-76 ◽  
Author(s):  
Z. T. Zhao
Keyword(s):  
Light Source ◽  
Storage Ring ◽  
Current Status ◽  
Light Sources ◽  
Third Generation ◽  
Next Generation ◽  
Future Developments ◽  
The Future ◽  
Historical Remarks ◽  
Development And Evolution

This article outlines the development and evolution of storage ring light sources, focusing on the latest, third generation light sources. After making brief historical remarks, it describes the current status, the performance, and the technological advancements of third generation light sources. The future developments of the ultimate storage ring as the next generation light source are envisioned.

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