Highly (h00) oriented growth of SrTiO 3 thin films on Si(100) substrates by RF magnetron sputtering and their optical properties

2008 ◽  
Author(s):  
J. H. Ma ◽  
J. H. Pin ◽  
Z. M. Huang ◽  
Y. H. Gao ◽  
T. Lin ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Oriented Growth

Investigation of annealing effects on optical properties of Ti thin films deposited by RF magnetron sputtering

Optik ◽  
2016 ◽  
Vol 127 (13) ◽  
pp. 5383-5389 ◽  
Author(s):  
I. Manouchehri ◽  
K. Gholami ◽  
B. Astinchap ◽  
R. Mordian ◽  
D. Mehrparvar
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Annealing Effects

Optical properties of ZnO homoepitaxial thin films grown by an rf-magnetron sputtering method

2006 ◽  
Vol 3 (10) ◽  
pp. 3504-3507
Author(s):  
S. Wakaiki ◽  
D. Kim ◽  
S. Komura ◽  
K. Mizoguchi ◽  
M. Nakayama
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering

Effect of Argon Gas Pressure on Optical Properties of Zinc Oxide Thin Films Deposited by RF Magnetron Sputtering Technique

2014 ◽  
Vol 904 ◽  
pp. 205-208
Author(s):  
J.H. Gu ◽  
Z.Y. Zhong ◽  
S.B. Chen ◽  
C.Y. Yang ◽  
J. Hou
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Refractive Index ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Optical Band Gap ◽  
Rf Magnetron Sputtering ◽  
Gas Pressure ◽  
Argon Gas ◽  
Deposited Films

Zinc oxide (ZnO) thin films were deposited by radio frequency (RF) magnetron sputtering technique on glass substrates in pure argon gas. The optical transmission stectra of the films were measured by ultraviolet-visible spectrophotometer. The effects of argon gas pressure on optical properties of the deposited films were investigated. The optical band-gap of the films was evaluated in terms of the Taucs law. The results show that the argon gas pressure has slightly affected the optical band-gap of the deposited films. Furthermore, the refractive index and extinction coefficient of the films were determined by means of the optical characterization methods. Meanwhile, the dispersion behavior of the refractive index was studied by the single-oscillator model of Wemple and DiDomenico, and the physical parameters of the average oscillator strength, average oscillator wavelength, oscillator energy, the refractive index dispersion parameter and the dispersion energy were obtained.

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