Control of a deformable mirror subject to structural disturbance

2008 ◽  
Author(s):  
Matthew R. Allen ◽  
Jae Jun Kim ◽  
Brij Agrawal
Keyword(s):  
Deformable Mirror ◽  
Structural Disturbance

Large-aperture deformable mirror correction of tiled-grating wavefront error

2006 ◽  
Vol 133 ◽  
pp. 645-648 ◽  
Author(s):  
B. E. Kruschwitz ◽  
R. Jungquist ◽  
J. Qiao ◽  
S. Abbey ◽  
S. E. Dean ◽  
...  
Keyword(s):  
Deformable Mirror ◽  
Large Aperture ◽  
Wavefront Error

Study and manufacture of a novel micro-deformable mirror

2003 ◽  
Author(s):  
Hongbin Yu ◽  
Haiqing Chen ◽  
Zimin Zhu ◽  
Chao Wang ◽  
Dacheng Zhang ◽  
...  
Keyword(s):  
Deformable Mirror

Correcting for Spherical Aberrations in Solid Immersion Microscopy Using a Deformable Mirror

2011 ◽  
Author(s):  
Y. Lu ◽  
E. Ramsay ◽  
C. Stockbridge ◽  
F. H. Koklu ◽  
A. Yurt ◽  
...  
Keyword(s):  
Failure Analysis ◽  
Error Correction ◽  
Deformable Mirror ◽  
Wafer Thickness ◽  
Wavefront Error ◽  
Substrate Wafer ◽  
Thickness Error

Abstract We present a method for correcting spherical aberrations in solid immersion microscopy through the use of a deformable mirror. Aberrations in solid immersion imaging for failure analysis can be induced through off-axis imaging, errors in lens fabrication or mismatch of design and substrate wafer thickness. RMS wavefront error correction of 30% is demonstrated in the case of substrate wafer thickness error.

Optimized design of high efficient voice coil actuator in deformable mirror

2020 ◽  
Vol 35 (11) ◽  
pp. 1110-1119
Author(s):  
Shuo CAO ◽  
◽  
Zhi-gao ZHANG ◽  
Zhi-yun ZHAO ◽  
Hu GU ◽  
...  
Keyword(s):  
Deformable Mirror ◽  
Optimized Design ◽  
High Efficient ◽  
Voice Coil Actuator

scholarly journals Beam Shaping by a Magnetic Fluid Deformable Mirror With Curved Trajectory for Optical Tweezer System

IEEE Access ◽  
2021 ◽  
Vol 9 ◽  
pp. 121645-121653
Author(s):  
Xiang Wei ◽  
Yongjun Yang ◽  
Dziki Mbemba ◽  
Feng Li ◽  
Zhizheng Wu ◽  
...  
Keyword(s):  
Magnetic Fluid ◽  
Optical Tweezer ◽  
Beam Shaping ◽  
Deformable Mirror

scholarly journals Control oriented modelling and modal analysis of the deformable mirror M4 of the extremely large telescope

2021 ◽  
Vol 27 (1) ◽  
pp. 295-321
Author(s):  
Philip L. Neureuther ◽  
Kevin Schmidt ◽  
Thomas Bertram ◽  
Oliver Sawodny
Keyword(s):  
Modal Analysis ◽  
Deformable Mirror ◽  
Large Telescope

Thermo-mechanical properties of a deformable mirror with screen printed actuator

2012 ◽  
Author(s):  
C. Bruchmann ◽  
M. Appelfelder ◽  
E. Beckert ◽  
R. Eberhardt ◽  
A. Tünnermann
Keyword(s):  
Mechanical Properties ◽  
Deformable Mirror ◽  
Screen Printed
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