Recent developments in UV laser micromachining

2008 ◽  
Author(s):  
R. Delmdahl ◽  
Rainer Pätzel
2008 ◽  
Author(s):  
Jae-Hoon Lee ◽  
Hyonkee Sohn ◽  
Dong-Sig Shin ◽  
Ji-Whan Noh ◽  
Nam-Sung Kim ◽  
...  

Author(s):  
Emanuel A. Waddell ◽  
Laurie E. Locascio ◽  
Gary W. Kramer

1983 ◽  
Vol 29 ◽  
Author(s):  
J. Y. Tsao ◽  
D. J. Ehrlich

ABSTRACTTechniques for laser-photochemically depositing localized thin films are reviewed. A comparison is made between techniques relying on gas-phase and surface-phase photochemistry. New photoreactions, confined entirely to surface phases, are described, including multimolecular reactions based on methyl methacrylate, and multicomponent reactions based on mixtures of trimethylaluminum and titanium tetrachloride. Recent developments in the use of surface photochemistry to nucleate subsequent growth by pyrolytic chemical vapor deposition are also reported.


2019 ◽  
Vol 14 (11) ◽  
pp. 1175-1177
Author(s):  
Souvik Paul ◽  
Saswata Mukhopadhyay ◽  
Soumen Mandal ◽  
Pankaj Agarwal ◽  
Nripen Chanda

2006 ◽  
Vol 252 (13) ◽  
pp. 4897-4901 ◽  
Author(s):  
E. Gu ◽  
H. Howard ◽  
A. Conneely ◽  
G.M. O’Connor ◽  
E.K. Illy ◽  
...  

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