Process manufacturability evaluation for next generation immersion technology node

2008 ◽  
Author(s):  
M. Enomoto ◽  
T. Shimoaoki ◽  
T. Otsuka ◽  
S. Hatakeyama ◽  
K. Nafus ◽  
...  
Keyword(s):  
Next Generation ◽  
Technology Node ◽  
Manufacturability Evaluation

Initial process evaluation for next generation immersion technology node

2007 ◽  
Author(s):  
Tadatoshi Tomita ◽  
Kathleen Nafus ◽  
Shinichi Hatakeyama ◽  
Hitoshi Kosugi ◽  
Masashi Enomoto ◽  
...  
Keyword(s):  
Process Evaluation ◽  
Next Generation ◽  
Technology Node ◽  
Initial Process

Optical Fault Isolation and Nanoprobing Techniques for the 10 nm Technology Node and Beyond

2015 ◽  
Author(s):  
Martin von Haartman ◽  
Samia Rahman ◽  
Satyaki Ganguly ◽  
Jai Verma ◽  
Ahmad Umair ◽  
...  
Keyword(s):  
Process Development ◽  
State Of The Art ◽  
Fault Isolation ◽  
Generation Process ◽  
Next Generation ◽  
Process Technology ◽  
Technology Node ◽  
Test Chips ◽  
Semiconductor Process

Abstract Resolution of optical fault isolation (FI) and nanoprobing tools needs to keep pace with the device downscaling to be effective for semiconductor process development. In this paper we present and discuss state-of-the-art FI and nanoprobing techniques evaluated on Intel test-chips fabricated on next generation process technology. Promising results were obtained but further improvements are necessary for the 7nm node and beyond.

Advanced mask-to-mask overlay analysis for next generation technology node reticles

2010 ◽  
Author(s):  
Klaus-Dieter Roeth ◽  
Frank Laske ◽  
Karl-Heinrich Schmidt ◽  
Dieter Adam ◽  
Oliver Ache ◽  
...  
Keyword(s):  
Overlay Analysis ◽  
Next Generation ◽  
Technology Node ◽  
Generation Technology

Multilevel metal/Pb(Zr0.52Ti0.48)O3/TiOxNy/Si for next generation FeRAM technology node

2015 ◽  
Vol 111 ◽  
pp. 42-46 ◽  
Author(s):  
Deepak K. Sharma ◽  
Robin Khosla ◽  
Satinder K. Sharma
Keyword(s):  
Next Generation ◽  
Technology Node

1477: Durability of Next Generation Flexible Ureteroscopes: Randomized Prospective Study

2004 ◽  
Vol 171 (4S) ◽  
pp. 389-389
Author(s):  
Manoj Monga ◽  
Ramakrishna Venkatesh ◽  
Sara Best ◽  
Caroline D. Ames ◽  
Courtney Lee ◽  
...  
Keyword(s):  
Prospective Study ◽  
Next Generation ◽  
Flexible Ureteroscopes

Aging for the Next Generation of Gerontologists

1996 ◽  
Vol 41 (1) ◽  
pp. 52-53
Author(s):  
Lisa C. McGuire
Keyword(s):  
Next Generation
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