3D integration of microfluidics and microoptics inside photosensitive glass by femtosecond laser direct writing for photonic biosensing

2008 ◽  
Author(s):  
Koji Sugioka ◽  
Zhongke Wang ◽  
Katsumi Midorikawa
Keyword(s):  
Femtosecond Laser ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
3D Integration ◽  
Photosensitive Glass

Microfabrication of Photosensitive Glass by Femtosecond Laser Direct Writing

2010 ◽  
Vol 126-128 ◽  
pp. 394-400
Author(s):  
C.W. Cheng ◽  
J.S. Chen ◽  
P.X. Lee ◽  
C.W. Chien
Keyword(s):  
Electron Microscopy ◽  
Heat Treatment ◽  
Scanning Electron Microscopy ◽  
Femtosecond Laser ◽  
Acid Solution ◽  
Chemical Etching ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Photosensitive Glass ◽  
Scanning Electron

In this study, a method for the fabrication of microstructures on the surface and inside photosensitive glass (Foturan glass) by femtosecond laser-induced modification was developed. This technique was followed by heat treatment to crystallize the modified area, and the specimen was then placed in an HF acid solution for chemical etching. The fabricated microstructures were observed using scanning electron microscopy (SEM). Two examples: (a) a U-shaped microchannel and (b) an arc-type microchannel formed inside glass are presented.

Fabrication of microlens arrays in photosensitive glass by femtosecond laser direct writing

2009 ◽  
Vol 97 (4) ◽  
pp. 751-757 ◽  
Author(s):  
C. H. Lin ◽  
L. Jiang ◽  
Y. H. Chai ◽  
H. Xiao ◽  
S. J. Chen ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Microlens Arrays ◽  
Photosensitive Glass

Wavelength tunable fiber Bragg gratings fabricated by stress annealing assisted femtosecond laser direct writing

2021 ◽  
Vol 61 ◽  
pp. 102427
Author(s):  
Xiaoyan Sun ◽  
Zikun Chang ◽  
Li Zeng ◽  
Xinran Dong ◽  
Youwang Hu ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Fiber Bragg Gratings ◽  
Bragg Gratings ◽  
Direct Writing ◽  
Laser Direct Writing ◽  
Wavelength Tunable
Sign in / Sign up

Export Citation Format

Share Document