Zone plate efficiency measurements with a laser-plasma source

2007 ◽  
Author(s):  
Michael C. Bertilson ◽  
Per A. C. Takman ◽  
Anders Holmberg ◽  
Ulrich Vogt ◽  
Hans M. Hertz
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Zone Plate ◽  
Plate Efficiency

Zone plate x-ray microscope using a laser plasma source

1993 ◽  
Author(s):  
Hiroaki Aritome ◽  
Shigeru Nakayama ◽  
Katsumi Mizunoe ◽  
Guan-ming Zeng ◽  
Hiroyuki Daido ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Zone Plate ◽  
X Ray

Zone-Plate X-Ray Microscope Using a Laser Plasma Source

1994 ◽  
Vol 33 (Part 2, No. 9A) ◽  
pp. L1280-L1282 ◽  
Author(s):  
Shigeru Nakayama ◽  
Kazuhito Haramura ◽  
Guang-Ming Zeng ◽  
Hiroyuki Daido ◽  
Masahiro Nakatsuka ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Zone Plate ◽  
X Ray

Status of the liquid-xenon-jet laser-plasma source for EUV lithography

2002 ◽  
Author(s):  
Bjoern A. M. Hansson ◽  
Lars Rymell ◽  
Magnus Berglund ◽  
Oscar E. Hemberg ◽  
Emmanuelle Janin ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
Liquid Xenon ◽  
Euv Lithography

Laboratory arrangement for soft x-ray zone plate efficiency measurements

2007 ◽  
Vol 78 (2) ◽  
pp. 026103 ◽  
Author(s):  
Michael C. Bertilson ◽  
Per A. C. Takman ◽  
Anders Holmberg ◽  
Ulrich Vogt ◽  
Hans M. Hertz
Keyword(s):  
Zone Plate ◽  
X Ray ◽  
Plate Efficiency

Laser plasma source for soft x-ray imaging in CIOM

1997 ◽  
Author(s):  
Zhongxing Shao ◽  
Zhanshan Wang ◽  
Fengming Xu ◽  
Junxia Lu ◽  
Xingdan Chen
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
X Ray ◽  
X Ray Imaging

Calibration Of A KrF Laser-Plasma Source For X-Ray Microscopy Applications

1988 ◽  
Author(s):  
I C. E. Turcu ◽  
F O'Neill ◽  
U Zammit ◽  
Y Al-Hadithi ◽  
R W. Eason ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source ◽  
X Ray ◽  
Krf Laser

XUV laser-plasma source based on solid Ar filament

2007 ◽  
Vol 78 (10) ◽  
pp. 103509 ◽  
Author(s):  
Christian Peth ◽  
Anton Kalinin ◽  
Frank Barkusky ◽  
Klaus Mann ◽  
J. Peter Toennies ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Source
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