Basic principle of a new measurement system of long measuring range of digital modulation

2006 ◽  
Author(s):  
Zeng-yao Zhang ◽  
Qian-min Mao
Keyword(s):  
Basic Principle ◽  
Measurement System ◽  
Measuring Range ◽  
Digital Modulation

A Measurement System for Step Imprint Lithography

2005 ◽  
Vol 295-296 ◽  
pp. 107-112 ◽  
Author(s):  
H.Z. Liu ◽  
Bing Heng Lu ◽  
Y.C. Ding ◽  
D.C. Li ◽  
Yi Ping Tang ◽  
...  
Keyword(s):  
Measurement System ◽  
Special Structure ◽  
Nanometer Scale ◽  
Pattern Transfer ◽  
Imprint Lithography ◽  
Line Position ◽  
Measuring Range ◽  
Optical Reflection ◽  
On Line ◽  
Laser Interferometers

A precision 6-degree-of-freedom measurement system has been developed for simultaneous on-line measurements of imprint lithography stage. To successfully accomplish nanometer-scale pattern transfer from mold to resist film on the wafer, two types of positioning methods, static and dynamic, are used in this system. Two laser interferometers, two optical reflection mirrors and special structure on the stage with 3 elastic tracks are employed in this system to detect the positions and rotations of the stage. Through an algorithm, measurements of pitch, yaw and roll motions can be achieved. This system can realize on-line position detecting. Based on adjusting of PZTs, the detecting precision can reach 10nm and ±3 milli-arcsec, respectively. The measuring range can reach 100mm and ±10 arcsec, respectively.

Instantaneous Measurement of 3D Profiles by Projecting Coded Grating

2005 ◽  
Vol 295-296 ◽  
pp. 495-500
Author(s):  
A.L. Tian ◽  
B. Li ◽  
M.T. Huang ◽  
Zhuang De Jiang
Keyword(s):  
Data Processing ◽  
Measurement System ◽  
Moving Objects ◽  
Three Dimensional ◽  
Profile Measurement ◽  
3D Measurement ◽  
Human Face ◽  
Measuring Range ◽  
Data Processing Software ◽  
Processing Software

A three-dimensional profile measurement system based on a projection coded grating technique is presented. The system uses a designing and decoding technique for grey coded gratings. The coded grating has black, white and grey stripes. The period triples a conventional grating. It greatly increases the height measuring range without any decrease in stripe separation. The shape of object can be obtained from only one grating image. The system is suitable for instantaneous measurement of moving objects including human face. The technique proposed permits rapid 3D measurement and no moving parts are involved in the system. The hardware is relatively simple. Special data processing software is developed. Results of a practical example confirm the effectiveness of the proposed method.

Digital Modulation/Demodulation Measurement System within Connected Solution

2012 ◽  
Author(s):  
Sy-Haur Su ◽  
Shuw-Guann Lin ◽  
Hsu-Feng Hsiao ◽  
Da-Chiang Chang ◽  
Hwann-Kaeo Chiou
Keyword(s):  
Measurement System ◽  
Digital Modulation

Design of Ultrasonic Distance Measurement System Based on Microcontroller

2013 ◽  
Vol 333-335 ◽  
pp. 296-299
Author(s):  
Zhi Hong Xiao ◽  
Si Yu Wu ◽  
Qi Yuan An
Keyword(s):  
Measurement System ◽  
Distance Measurement ◽  
Measurement Circuit ◽  
Measuring Range ◽  
Interface Circuit ◽  
Serial Interface ◽  
Logic Control ◽  
Detection Circuit ◽  
Sequential Logic ◽  
Driver Circuit

The principle of an ultrasonic distance measurement system is introduced. The system adopts non-contact measurement method and it consists of signal generator, echo receiver circuit, microcontroller, time sequential logic control circuit, target distance detection circuit, temperature measurement circuit, RS-485 serial interface circuit, ultrasonic sensor and its driver circuit, etc. The results show that the system has high precision within measuring range from 20cm to 15m.

Development of a Construction Robot for Marking on Ceiling Boards

1997 ◽  
Vol 9 (4) ◽  
pp. 293-298 ◽  
Author(s):  
Kouetsu Tanaka ◽  
◽  
Makoto Kajitani ◽  
Chisato Kanamori ◽  
Yasunori Abe ◽  
...  
Keyword(s):  
Mobile Robots ◽  
Basic Principle ◽  
Measurement System ◽  
Reference Points ◽  
Autonomous Mobile Robots ◽  
Specific Reference

Previously, we proposed a self-positioning measurement system for autonomous mobile robots at work sites.1-4)The system depends on the basic principle of triangulation. Preparations are not required for specific reference points, but use pillars standing on the floor. We also developed a prototype robot that utilizes the system. The marking robot leaves a specific mark at the installation position for apparatuses on ceiling boards in large buildings. The robot moves autonomously, recognizes its position, and draws figures with an error of a few millimeters on the ceiling board. It can reach a height of about 3000mm.

The Influence Factors and Improvement Measures for Accuracy of Correlation Velocity Measurement

2012 ◽  
Vol 152-154 ◽  
pp. 1118-1121
Author(s):  
Xiang Lin Yang ◽  
Xiao Bing Huang
Keyword(s):  
Real Time ◽  
Basic Principle ◽  
Measurement System ◽  
Velocity Measurement ◽  
Sampling Error ◽  
Influence Factors ◽  
Discrete Sampling ◽  
The Real ◽  
Improvement Measures

he basic principle of the correlation velocity measurement is introduced, the influence factors for accuracy of the correlation velocity measurement are analyzed, the installation position and mode of the sensor, the real-time simplification error and the discrete sampling error are especially discussed according to the general and basic principle of the correlation velocity measurement system, and the corresponding measures are provided.

Measurement System Design of Rotary Viscosity Based on MCU and CPLD

2010 ◽  
Vol 174 ◽  
pp. 282-285
Author(s):  
Han Lin Yang ◽  
Tie Feng Zhang ◽  
Yan Xi Li ◽  
Jun Wang ◽  
Zhi Hui Sun
Keyword(s):  
Measurement System ◽  
Measurement Range ◽  
Viscosity Measurement ◽  
Torque Sensor ◽  
Hardware Platform ◽  
Measuring Range ◽  
Rotation Method ◽  
Acquisition Device ◽  
Data Acquisition Device ◽  
Constant Moment

In view of the deficiency of the traditional viscometer in the tunable gear position, the measuring accuracy and measuring range, designs a viscosity measurement system based on rotation method. The data acquisition device of the system is grating torque sensor, building the system hardware platform by AT89S52 MCU and CPLD. In the software aspect, proposes a driving method of motor based on multi-division driving method of constant moment rotation magnetic field microstep subdivision theory, in order to implement the multi-range continuous adjustment of the sensor, improves system viscosity measurement range and accuracy.

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