Silicon verification of flare model & application to real chip for long range proximity correction

2007 ◽  
Author(s):  
Dongqing Zhang ◽  
Byoung Il Choi ◽  
Foong Yee Mei ◽  
Suleni T. Mulia ◽  
Jung Yu Hsieh ◽  
...  
2013 ◽  
Vol 138 (23) ◽  
pp. 234103 ◽  
Author(s):  
Yalina Tritzant-Martinez ◽  
Tao Zeng ◽  
Aron Broom ◽  
Elizabeth Meiering ◽  
Robert J. Le Roy ◽  
...  

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