Multilevel step and flash imprint lithography for direct patterning of dielectrics

2007 ◽  
Author(s):  
Wei-Lun Jen ◽  
Frank Palmieri ◽  
Brook Chao ◽  
Michael Lin ◽  
Jianjun Hao ◽  
...  
Keyword(s):  
Imprint Lithography ◽  
Direct Patterning

Multi-level step and flash imprint lithography for direct patterning of dielectrics

2006 ◽  
Author(s):  
Frank Palmieri ◽  
Michael D. Stewart ◽  
Jeff Wetzel ◽  
Jianjun Hao ◽  
Yukio Nishimura ◽  
...  
Keyword(s):  
Imprint Lithography ◽  
Direct Patterning ◽  
Multi Level

Extreme-Pressure Imprint Lithography for Heat and Ultraviolet-Free Direct Patterning of Rigid Nanoscale Features

ACS Nano ◽  
2021 ◽  
Author(s):  
Woon Ik Park ◽  
Tae Wan Park ◽  
Young Joong Choi ◽  
Sangryun Lee ◽  
Seunghwa Ryu ◽  
...  
Keyword(s):  
Extreme Pressure ◽  
Imprint Lithography ◽  
Direct Patterning ◽  
Nanoscale Features

Direct Patterning of TiO2 Using Step-and-Flash Imprint Lithography

ACS Nano ◽  
2012 ◽  
Vol 6 (2) ◽  
pp. 1494-1502 ◽  
Author(s):  
Ramakrishnan Ganesan ◽  
Jarrett Dumond ◽  
Mohammad S. M. Saifullah ◽  
Su Hui Lim ◽  
Hazrat Hussain ◽  
...  
Keyword(s):  
Imprint Lithography ◽  
Direct Patterning

Laser-Direct Patterning of Nanostructured Metal Thin Films

2010 ◽  
Vol 48 (2) ◽  
pp. 163-168 ◽  
Author(s):  
Hyunkwon Shin ◽  
Hyeongjae Lee ◽  
Hyeongjae Yoo ◽  
Ki-Soo Lim ◽  
Myeongkyu Lee
Keyword(s):  
Thin Films ◽  
Metal Thin Films ◽  
Direct Patterning ◽  
Nanostructured Metal

Soft imprint lithography for liquid crystal alignment using a wrinkled UVO-treated PDMS transferring method

2021 ◽  
Vol 323 ◽  
pp. 115150
Author(s):  
Jung-Hyun Hwang ◽  
Jae-Sung Hong ◽  
Chan-Woo Oh ◽  
Min-Je Joe ◽  
Hae-Chang Jeong ◽  
...  
Keyword(s):  
Liquid Crystal ◽  
Imprint Lithography ◽  
Liquid Crystal Alignment ◽  
Crystal Alignment
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