Large-stroke self-aligned vertical comb drive actuated micromirror arrays for adaptive optics applications

2007 ◽  
Author(s):  
Emily Carr ◽  
Scot Olivier ◽  
Olav Solgaard
Keyword(s):  
Adaptive Optics ◽  
Comb Drive ◽  
Micromirror Arrays

Tests on micromirror arrays for adaptive optics

2004 ◽  
Author(s):  
Jan Liesener ◽  
Werner J. Hupfer ◽  
Andreas Gehner ◽  
Kotska Wallace
Keyword(s):  
Adaptive Optics ◽  
Micromirror Arrays

Low-Voltage, Large-Scan Angle MEMS Analog Micromirror Arrays With Hidden Vertical Comb-Drive Actuators

2004 ◽  
Vol 13 (2) ◽  
pp. 279-289 ◽  
Author(s):  
D. Hah ◽  
S.T.-Y. Huang ◽  
J.-C. Tsai ◽  
H. Toshiyoshi ◽  
M.C. Wu
Keyword(s):  
Low Voltage ◽  
Comb Drive ◽  
Micromirror Arrays

Drift-Free Micromirror Arrays Made of Monocrystalline Silicon for Adaptive Optics Applications

2012 ◽  
Vol 21 (4) ◽  
pp. 959-970 ◽  
Author(s):  
Martin Lapisa ◽  
Fabian Zimmer ◽  
Göran Stemme ◽  
Andreas Gehner ◽  
Frank Niklaus
Keyword(s):  
Adaptive Optics ◽  
Monocrystalline Silicon ◽  
Micromirror Arrays

Optimized micromirror arrays for adaptive optics

1999 ◽  
Author(s):  
M. Adrian Michalicek ◽  
John H. Comtois ◽  
Dale L. Hetherington
Keyword(s):  
Adaptive Optics ◽  
Micromirror Arrays

An Equivalent Circuit Model for Vertical Comb Drive MEMS Optical Scanner Controlled by Pulse Width Modulation

2012 ◽  
Vol 132 (1) ◽  
pp. 1-9 ◽  
Author(s):  
Satoshi Maruyama ◽  
Muneki Nakada ◽  
Makoto Mita ◽  
Takuya Takahashi ◽  
Hiroyuki Fujita ◽  
...  
Keyword(s):  
Equivalent Circuit ◽  
Pulse Width ◽  
Pulse Width Modulation ◽  
Equivalent Circuit Model ◽  
Circuit Model ◽  
Comb Drive ◽  
Optical Scanner
Sign in / Sign up

Export Citation Format

Share Document