Low-temperature processing of lead zirconate titanate thin films by 28 GHz microwave irradiation for MEMS application

2006 ◽  
Author(s):  
Z. J. Wang ◽  
H. Kokawa ◽  
H. Takizawa ◽  
M. Ichiki ◽  
R. Maeda
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Microwave Irradiation ◽  
Lead Zirconate Titanate ◽  
Lead Zirconate ◽  
Zirconate Titanate ◽  
Low Temperature Processing

Low-temperature processing of sol–gel-derived lead–zirconate–titanate thin films by oxygen-plasma treatment

2002 ◽  
Vol 2 (5) ◽  
pp. 407-409 ◽  
Author(s):  
Eung Kil Kang ◽  
Hyuk Kyoo Jang ◽  
Sung Kyun Lee ◽  
Eung Ryul Park ◽  
Cheol Eui Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Plasma Treatment ◽  
Lead Zirconate Titanate ◽  
Oxygen Plasma ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Oxygen Plasma Treatment ◽  
Zirconate Titanate ◽  
Low Temperature Processing

Rapid Crystallization of Sol–Gel-Deposited Lead Zirconate Titanate Thin Films by 2.45 GHz Microwave Irradiation

2008 ◽  
Vol 47 (9) ◽  
pp. 7519-7522 ◽  
Author(s):  
Zhan Jie Wang ◽  
Yuka Otsuka ◽  
Ziping Cao ◽  
Noboru Yoshikawa ◽  
Hiroyuki Kokawa
Keyword(s):  
Thin Films ◽  
Microwave Irradiation ◽  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Rapid Crystallization ◽  
Zirconate Titanate
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