Guided-wave optical pressure sensor with semi-closed space under the diaphragm: step response in relation to the area of a small hole of a semi-closed space

2006 ◽  
Author(s):  
Kaoru Sato ◽  
Masashi Ohkawa ◽  
Seishi Sekine ◽  
Takashi Sato
Keyword(s):  
Pressure Sensor ◽  
Guided Wave ◽  
Small Hole ◽  
Step Response ◽  
Closed Space ◽  
Optical Pressure

Guided-wave optical pressure sensor responding only to changing pressure

2005 ◽  
Author(s):  
Yoshisumi Endo ◽  
Masashi Ohkawa ◽  
Seishi Sekine ◽  
Takashi Sato
Keyword(s):  
Pressure Sensor ◽  
Guided Wave ◽  
Optical Pressure

scholarly journals Sensitivity dependences on side length and aspect ratio of a diaphragm in a glass-based guided-wave optical pressure sensor

2008 ◽  
Vol 16 (19) ◽  
pp. 15024 ◽  
Author(s):  
Hiroyuki Nikkuni ◽  
Yu Watanabe ◽  
Masashi Ohkawa ◽  
Takashi Sato
Keyword(s):  
Aspect Ratio ◽  
Pressure Sensor ◽  
Guided Wave ◽  
Side Length ◽  
Optical Pressure

Optical microphone using a silicon-based guided-wave optical pressure sensor

2005 ◽  
Author(s):  
Hiroyuki Nikkuni ◽  
Shuuichi Dokko ◽  
Masashi Ohkawa ◽  
Seishi Sekine ◽  
Takashi Sato
Keyword(s):  
Pressure Sensor ◽  
Guided Wave ◽  
Optical Pressure ◽  
Silicon Based

Dependence of Resonance Frequency on Diaphragm Dimensions in a Guided-Wave Optical Pressure Sensor

2009 ◽  
Vol 129 (10) ◽  
pp. 357-362
Author(s):  
Mizuki Nakajima ◽  
Hiroyuki Nikkuni ◽  
Masashi Ohkawa ◽  
Takashi Sato
Keyword(s):  
Resonance Frequency ◽  
Pressure Sensor ◽  
Guided Wave ◽  
Optical Pressure

A Compact Optical Pressure Sensor Based on a III-Nitride Photonic Chip with Nanosphere-Embedded PDMS

2021 ◽  
Author(s):  
Jixiang Jing ◽  
Xiaoshuai An ◽  
Yumeng Luo ◽  
Liang Chen ◽  
Zhiqin Chu ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Optical Pressure
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