A micro-optical electromechanical system (MOEMS) for high-precision displacement sensor design using ring resonator array
Keyword(s):
2011 ◽
Vol 217-218
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pp. 1797-1801
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Keyword(s):
2013 ◽
Vol 13
(4)
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pp. 1153-1160
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2018 ◽
Vol 36
(18)
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pp. 4046-4050
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Keyword(s):
2021 ◽