Approximate method of mask flatness factor in focus deviation
2017 ◽
Vol 11
(2)
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pp. 108
1983 ◽
Vol 48
(10)
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pp. 2751-2766
2021 ◽
pp. 095440622110214
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2012 ◽
Vol 55
(1-3)
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pp. 310-315
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1963 ◽
Vol 35
(11)
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pp. 1903-1904
2013 ◽
Vol 68
(6)
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pp. 292-294
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