Surface gradient integrated profiler for x-ray and EUV optics: 3D mapping of 1m-long flat mirror and off-axis parabolic mirror
2015 ◽
Vol 18
(4)
◽
pp. 132
2000 ◽
Vol 11
(5)
◽
pp. 484-488
◽
2015 ◽
Vol 147-148
◽
pp. 115-125
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2014 ◽
Vol 441
(4)
◽
pp. 3170-3176
◽
2007 ◽
Vol 8
(3)
◽
pp. 177-180
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