FPGA cluster for high-performance AO real-time control system

2006 ◽  
Author(s):  
Deli Geng ◽  
Stephen J. Goodsell ◽  
Alastair G. Basden ◽  
Nigel A. Dipper ◽  
Richard M. Myers ◽  
...  
Keyword(s):  
Control System ◽  
Real Time ◽  
High Performance ◽  
Real Time Control ◽  
Time Control

Design of Control System for Micro Tracklayer Based on μc/os-Ⅱ

2011 ◽  
Vol 130-134 ◽  
pp. 3356-3359
Author(s):  
Jin Song Wei ◽  
Feng Qi Gao ◽  
Guang Long Wang
Keyword(s):  
Control System ◽  
Real Time ◽  
High Performance ◽  
Control Object ◽  
Information Collection ◽  
Real Time Control ◽  
General Design ◽  
Design Project ◽  
Time Control ◽  
Arm Microprocessor

A kind of control system which consists of high performance ARM microprocessor and embedded real-time operate system is put forward and researcheed. The control object and the requirements of system are analyzed; the general design project is determined; the control arithmetic and software structure are introduced in the end. ARM microprocessor is the intelligent core of the system. Matched with μCOS-II RTOS and application program, the system can complete the functions of information collection and real-time control.

A New Flexible Rapid Thermal Processing System

1995 ◽  
Vol 389 ◽  
Author(s):  
K. C. Saraswat ◽  
Y. Chen ◽  
L. Degertekin ◽  
B. T. Khuri-Yakub
Keyword(s):  
Control System ◽  
Real Time ◽  
Processing System ◽  
Process Conditions ◽  
Temperature Uniformity ◽  
Real Time Control ◽  
Wafer Temperature ◽  
Time Control ◽  
Wide Range ◽  
Optical Flux

ABSTRACTA highly flexible Rapid Thermal Multiprocessing (RTM) reactor is described. This flexibility is the result of several new innovations: a lamp system, an acoustic thermometer and a real-time control system. The new lamp has been optimally designed through the use of a “virtual reactor” methodology to obtain the best possible wafer temperature uniformity. It consists of multiple concentric rings composed of light bulbs with horizontal filaments. Each ring is independently and dynamically controlled providing better control over the spatial and temporal optical flux profile resulting in excellent temperature uniformity over a wide range of process conditions. An acoustic thermometer non-invasively allows complete wafer temperature tomography under all process conditions - a critically important measurement never obtained before. For real-time equipment and process control a model based multivariable control system has been developed. Extensive integration of computers and related technology for specification, communication, execution, monitoring, control, and diagnosis demonstrates the programmability of the RTM.

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