The EMIR detector translation unit: a cryogenic high-precision 3-DoF parallel mechanism

Author(s):  
Lorenzo Zago ◽  
Serge Droz ◽  
Livia Racz ◽  
Albert Molins
Procedia CIRP ◽  
2013 ◽  
Vol 5 ◽  
pp. 175-178 ◽  
Author(s):  
Hiroaki Kozuka ◽  
Jumpei Arata ◽  
Kenji Okuda ◽  
Akinori Onaga ◽  
Motoshi Ohno ◽  
...  

2014 ◽  
Vol 590 ◽  
pp. 126-129
Author(s):  
Ryoshu Furutani ◽  
Satoshi Yokouchi ◽  
Miyu Ozaki

It is important to calibrate the straightness and the squareness of the XY-stage for precision manufacturing and measurement. Normally it is calibrated using much higher precise and accurate measuring instruments and/or artifacts. The high precision and accurate instruments and artifacts are expensive. So, in this paper, Self-calibration method is applied to XY-stage. This method does not require any much high precision and accurate instruments and artifacts. The normal XY-stage moves to the location at the unique coordinates. In this case, it is difficult to apply self-calibration method. Therefore, XY-stage is expanded to XYθ-stage with parallel mechanism. As this stage moves to the location at a lot of coordinates, self-calibration method is applied. This method is confirmed in simulation and experiment. In simulation, the extension lengths of mechanism are estimated from known kinematic parameters and the target coordinates. After that, estimated kinematic parameters are calculated by least-squares method from the extension lengths and the target coordinates. Finally, the positioning coordinates are calculated from the estimated kinematic parameters and the extension lengths. It is proved that the calibration method is effective by comparing the target coordinates and the positioning coordinates. In experiment, the experimental process is similar to the simulation without the estimation of extension lengths. The results of simulation and experiment are shown in this paper.


2006 ◽  
Vol 2006.43 (0) ◽  
pp. 177-178
Author(s):  
Ryoji HATTORI ◽  
Hiroshi TACHIYA ◽  
Naoki ASAKAWA ◽  
Yoshiyuki KANEKO ◽  
Hiroshi YACHI

2010 ◽  
Vol 2010 (0) ◽  
pp. _1A1-E23_1-_1A1-E23_2
Author(s):  
Hiroaki KOZUKA ◽  
Yasuhiro SAITO ◽  
Jumpei ARATA ◽  
Kenji OKUDA ◽  
Akinori ONAGA ◽  
...  

Author(s):  
Guangbo Hao ◽  
Marc Murphy ◽  
Xichun Luo

This paper develops a light-weight compact three-axis force senor for high-precision manufacturing application. This sensor uses a cubic three-axial translational compliant parallel mechanism to undergo the loading on its end-effector thereby producing voltages through strain gauges on the deformed beams. The cubic compliant parallel mechanism and sensor system are described at first. Force sensing theoretical analysis is then presented followed by the initial experimental testing and analysis. A linear matrix based multi-axis loading decoupling method is also proposed so that the sensed force can maximally reflect the actual applied force in each axis. The work in this paper is expected to lay a foundation for further investigation into the online force sensing in the high-precision machine tool.


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