Self-assembled polymer MEMS sensors and actuators

2006 ◽  
Author(s):  
Andrea J. Hill ◽  
Richard O. Claus ◽  
Jennifer H. Lalli ◽  
Michelle Homer
Keyword(s):  
Mems Sensors ◽  
Sensors And Actuators ◽  
Self Assembled ◽  
Polymer Mems

scholarly journals Pairing electrostatic levitation with triboelectric transduction for high-performance self-powered MEMS sensors and actuators

2019 ◽  
Vol 115 (13) ◽  
pp. 133503 ◽  
Author(s):  
Mark Pallay ◽  
Alwathiqbellah I. Ibrahim ◽  
Ronald N. Miles ◽  
Shahrzad Towfighian
Keyword(s):  
High Performance ◽  
Electrostatic Levitation ◽  
Mems Sensors ◽  
Sensors And Actuators ◽  
Self Powered

Multi-Physics Equivalent Circuit Model for MEMS Sensors and Actuators

2013 ◽  
Vol 50 (14) ◽  
pp. 55-61 ◽  
Author(s):  
T. Konishi ◽  
K. Machida ◽  
K. Masu ◽  
H. Toshiyoshi
Keyword(s):  
Equivalent Circuit ◽  
Equivalent Circuit Model ◽  
Circuit Model ◽  
Mems Sensors ◽  
Sensors And Actuators

A Novel Semi-Analytical Approach for Micro Beams Subjected to Electrostatic Loads and Residual Stress Gradients

2009 ◽  
Author(s):  
Kuang-Shun Ou ◽  
Kuo-Shen Chen ◽  
Tian-Shiang Yang ◽  
Sen-Yung Lee
Keyword(s):  
Residual Stress ◽  
Analytical Approach ◽  
Processing Parameters ◽  
Shape Functions ◽  
Mems Sensors ◽  
Sensors And Actuators ◽  
Analytical Formulation ◽  
Stress Gradients ◽  
Admissible Deformation ◽  
Parametric Studies

Beam structures are widely used in MEMS sensors and actuators. MEMS micro beams are usually curled due to residual stresses and the characteristics of micro beams subjected to both residual stress gradients and electrostatic forces must be investigated for providing accuracy information for designing sensors and actuators. In this work, a novel semi-analytical formulation to address the above needs is proposed. By assuming an admissible deformation shape and utilizing energy method to determine the coefficients of the shape functions, it is possible to find the pull-in characteristics of the curled cantilevers. Detail parametric studies are subsequently performed to quantify the influence of various geometry and processing parameters on the pull-in characteristics of those micro beams. The method and results presented in this work would be very useful for related micro sensors and actuator designs.

Electrodeposition and characterization of CoNiMnP permanent magnet arrays for MEMS sensors and actuators

2012 ◽  
Vol 188 ◽  
pp. 190-197 ◽  
Author(s):  
Xuming Sun ◽  
Quan Yuan ◽  
Dongming Fang ◽  
Haixia Zhang
Keyword(s):  
Permanent Magnet ◽  
Mems Sensors ◽  
Sensors And Actuators
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