Development of EUV resists in supercritical CO 2 solutions using CO 2 compatible salts (CCS): results from a two-level full factorial design of experiments (DOE)

2006 ◽  
Author(s):  
Mark Wagner ◽  
James DeYoung ◽  
Chris Harbinson ◽  
Merrick Miles
2020 ◽  
Author(s):  
A. Saravanakumar ◽  
L. Rajeshkumar ◽  
N. S. Sanjay kumar ◽  
R. Sivakumar ◽  
S. Sriramthilak ◽  
...  

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