Development of EUV resists in supercritical CO 2 solutions using CO 2 compatible salts (CCS): results from a two-level full factorial design of experiments (DOE)
2019 ◽
Vol 5
(2/3)
◽
pp. 83
2019 ◽
Vol 5
(2/3)
◽
pp. 83
◽
2012 ◽
Vol 127
(5)
◽
pp. 3712-3724
◽
2016 ◽
Vol 35
(6)
◽
pp. 742-748
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