Investigation of femtosecond laser irradiation on fused silica

2006 ◽  
Author(s):  
Yves Bellouard ◽  
Tristan Colomb ◽  
Christian Depeursinge ◽  
Ali A. Said ◽  
Mark Dugan ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Fused Silica ◽  
Femtosecond Laser Irradiation

scholarly journals Stress-state manipulation in fused silica via femtosecond laser irradiation

Optica ◽  
2016 ◽  
Vol 3 (12) ◽  
pp. 1285 ◽  
Author(s):  
Yves Bellouard ◽  
Audrey Champion ◽  
Benjamin McMillen ◽  
Sebabrata Mukherjee ◽  
Robert R. Thomson ◽  
...  
Keyword(s):  
Stress State ◽  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Fused Silica ◽  
Femtosecond Laser Irradiation

scholarly journals High repetition rate femtosecond laser irradiation of fused silica studied by Raman spectroscopy

2015 ◽  
Vol 6 (1) ◽  
pp. 79 ◽  
Author(s):  
Nadezda Varkentina ◽  
Marc Dussauze ◽  
Arnaud Royon ◽  
Marc Ramme ◽  
Yannick Petit ◽  
...  
Keyword(s):  
Raman Spectroscopy ◽  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
Fused Silica ◽  
Femtosecond Laser Irradiation ◽  
High Repetition

Investigation of Femtosecond Laser Irradiation on Fused Silica Etching Selectivity

2004 ◽  
Vol 850 ◽  
Author(s):  
Yves Bellouard ◽  
Ali A. Said ◽  
Mark Dugan ◽  
Philippe Bado
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Structural Changes ◽  
Scanning Speed ◽  
Fused Silica ◽  
Index Of Refraction ◽  
Femtosecond Laser Irradiation ◽  
Etching Selectivity ◽  
Line Patterns ◽  
Chemical Selectivity

ABSTRACTFemtosecond laser irradiation has various noticeable effects on fused silica. It can locally increase the index of refraction or modify the material chemical selectivity. Regions that have been exposed to the laser are etched several times faster than unexposed regions. Various observations reported in the literature seem to show that these effects are possibly related to a combination of structural changes and the presence of internal stress. However, a detailed analysis of the contribution of both effects is still lacking.In this paper, we present systematic SEM-based investigations performed on fused silica (a-SiO2). Line-patterns were first scanned on the substrate using a femtosecond laser and then etched in a low-concentration HF solution. The effects of various laser parameters like power and scanning speed are analyzed and we show further evidence of an interface between two different etching regimes.

scholarly journals Micromanufacturing in Fused Silica via Femtosecond Laser Irradiation Followed by Gas-Phase Chemical Etching

Micromachines ◽  
2012 ◽  
Vol 3 (4) ◽  
pp. 604-614 ◽  
Author(s):  
Francesco Venturini ◽  
Maurizio Sansotera ◽  
Rebeca Martinez Vazquez ◽  
Roberto Osellame ◽  
Giulio Cerullo ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Gas Phase ◽  
Chemical Etching ◽  
Fused Silica ◽  
Femtosecond Laser Irradiation ◽  
Phase Chemical

scholarly journals Effect of femtosecond laser irradiation on structure of UV grade fused silica

2006 ◽  
Vol 14 (20) ◽  
pp. 9217 ◽  
Author(s):  
W. Zhou ◽  
T. T. Tan ◽  
L. E. N. Lim ◽  
H. Y. Zheng ◽  
S. Zhu ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Irradiation ◽  
Fused Silica ◽  
Femtosecond Laser Irradiation
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