Porous silicon-based Bragg reflectors and Fabry-Perot interference filters for photonic applications

Author(s):  
Dharmalingam Mangaiyarkarasi ◽  
Mark B.H. Breese ◽  
Ow Yueh Sheng ◽  
Kambiz Ansari ◽  
Chellappan Vijila ◽  
...  
1996 ◽  
Vol 452 ◽  
Author(s):  
G. Lérondel ◽  
P. Ferrand ◽  
R. Romestain

AbstractWe account for the elaboration of Bragg reflectors and microcavities based on efficiently luminescent porous silicon. A characterisation of very thin porous silicon layers obtained with current densities of formation varying from 1.5 mA to 300 mA is presented. The resulting refractive index variation (typically from 1.37 to 1.86 at 700 nm) enables the elaboration of high quality Bragg reflectors and Fabry-Perot filters from the yellow to the near infrared. Although low doped p-type porous silicon develops rougher interfaces than highly doped p-type porous silicon, its better luminescence efficiency has enabled us to elaborate microcavities with a strong emission in a narrow band.


2011 ◽  
Author(s):  
Guoguang Rong ◽  
Shengfei Pan ◽  
Chao Wu ◽  
Xiaobing Li ◽  
Minghong Yang

2005 ◽  
Vol 10 (1) ◽  
pp. 83-91 ◽  
Author(s):  
N. Samuolienė ◽  
E. Šatkovskis

Herein, the problem of nanocrystaline silicon laser and its importance in microelectronics are discussed upon. The features of vertical Fabry-Perot microcavities made on the base of porous silicon are described. The responses of the reflectivity of the distributed reflection Bragg mirrors and Fabry-Perot microcavities were found using transfer matrixes method for this purpose. Inherent optical parameters of porous silicon, deposited by electrochemical etch, were used in the calculations. The calculation of the reflectivity of the distributed reflection Bragg mirrors with front active layer of nanostructural porous silicon had been examined. In the second part, the features of Fabry-Perot microcavities on variation of the number of layers of the front or rear mirrors are described. The impact of the thickness of the active nanocrystaline silicon spacer between two distributed reflection Bragg mirrors upon the spectra of optical reflectivity of Fabry-Perot microcavities in the wavelength range of 0.4–0.9 µm had been examined as well. The made conclusions are important for improvement of the thickness of the active porous silicon spacer in front of Bragg mirror and the features of Fabry-Perot microcavities.


1998 ◽  
Vol 536 ◽  
Author(s):  
Keiki-Pua S. Dancil ◽  
Douglas P. Greiner ◽  
Michael J. Sailor

AbstractIn this paper we demonstrate that porous silicon (PS) can be used as an immobilization matrix and a transducer for biosensor applications. Thin layers of PS were fabricated showing fine structure in their reflection spectra, characteristic of longitudinal optical cavity modes, or Fabry-Perot interference fringes. The PS surface was modified by covalently bonding streptavidin to a heterobifunctional linker immobilized to the surface using common silane chemistry. The mode spacing and wavelength in the interference spectrum was modified, by displacing buffer and introducing proteins into the PS layer. Protein-protein interactions between immobilized Streptavidin and biotinylated Protein A followed by Protein A and IgG were detected. The surface was regenerated during the course of the experiment showing reversibility of the sensor at the third layer.


2009 ◽  
Vol 5 ◽  
pp. 69-78 ◽  
Author(s):  
B. Alvarado Tenorio ◽  
J. Escorcia-Garcia ◽  
Miguel Eduardo Mora-Ramos ◽  
V. Agarwal

To investigate the optical properties in non-periodic dielectric systems, we study here the reflection of light from nanostructured porous-silicon-based period doubling heterostructures. The multilayered systems are fabricated in such a way that the optical thickness of each layer is one quarter of 650nm. The results for the optical reflectance are presented and compared with that of Fibonacci, Thue-Morse, and random structures fabricated under the same conditions. Numerical simulation for the reflectance along the lines of the transfer matrix approach is performed. In addition, optical reflection from Gaussian porous silicon multilayers is also briefly discussed. We find that porous silicon Period Doubling dielectric multilayers could demonstrate the optical properties similar to the classical periodic Febry-Perot interference filters with one or multiple resonant peaks, but with an advantage of having total optical thickness much lesser than that of the periodic structures.


2003 ◽  
Vol 797 ◽  
Author(s):  
J. Diener ◽  
N. Künzner ◽  
E. Gross ◽  
D. Kovalev ◽  
M. Fujii

ABSTRACTAnisotropic nanostructuring of bulk silicon (Si) leads to a significant optical anisotropy of single porous silicon (PSi) layers. A variation of the etching current in time allows a controlled modification of the porosity along the growth direction and therefore a three-dimensional variation of the refractive index (in plane an in depth). This technique can be important for photonic applications since it is the basis of a development of a variety of novel, polarization sensitive, silicon-based optical devices: retarders, dichroic Bragg Reflectors, dichroic microcavities and Si based polarizers.


1996 ◽  
Vol 431 ◽  
Author(s):  
M. Thönissen ◽  
M. G. Berger ◽  
M. Krüger ◽  
S. Billat ◽  
R. Arens-Fischer ◽  
...  

AbstractPorous silicon (PS) layers can easily be formed by an electrochemical etch process using a mixture of hydrofluoric acid (HF) and ethanol. The microstructure and porosity of the layers depend on the HF concentration, the doping level of the substrate and the current density applied during the etch process. Changing the current density during the etch process will result in a well defined layer structure consisting of layers with different porosities. Each single layer can be treated as an effective medium exhibiting a refractive index depending mainly on the porosity of the layer. Using reflectance measurements we have investigated the dependence of the refractive index of PS layers on the formation current density for different substrates. In addition the etch rate was determined by thickness measurements with an electron microscope. Based on these results various kinds of optical interference filters were studied. We have formed samples consisting of discrete single layers with different porosities (e.g. Bragg reflectors) as well as samples with continuous variation of the refractive index (rugate filters). Combining these PS filters with standard photolithography steps, microoptical devices such as spectral sensitive photodiodes can be realized.


1996 ◽  
Vol 452 ◽  
Author(s):  
M. Thönissen ◽  
M. G. Berger ◽  
M. Krüger ◽  
W. Theiβ ◽  
S. Hilbrich ◽  
...  

AbstractRecently passive optical devices like filter structures or waveguides based on porous silicon have attracted high interest due to their easy and cheap fabrication. We have formed interference filters using porous silicon by changing the current density during formation. For the specific design of these filter structures a calibration of the etch rate and the refractive indices is required. Therefore we have determined the effective dielectric function for different substrate doping levels and anodization current densities by fitting reflectance spectra. Based on these results different kinds of reflectance filters consisting of discrete layers (Bragg reflectors, Fabry-Perot filters) as well as filters with a continuous change of the refractive indices with depth (rugate-filters) can be realised. Furthermore we present applications of these filter structures such as anti-reflectance coatings and high quality mirrors.


2017 ◽  
Vol 35 (3) ◽  
pp. 117 ◽  
Author(s):  
Tiago Franca Paes ◽  
Antonio Fernando Beloto ◽  
Ellen Christine De Souza Galvão ◽  
Luiz Angelo Berni

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