Mask cleaning strategies: particle elimination with minimal surface damage

2005 ◽  
Author(s):  
Steve Osborne ◽  
Matthias Nanningas ◽  
Hidekazu Takahashi ◽  
Eric Woster ◽  
Carl Kanda ◽  
...  
Keyword(s):  
Minimal Surface ◽  
Surface Damage ◽  
Mask Cleaning ◽  
Particle Elimination

Low Damage Magnetron Reactive Ion Etching of GaAs

1991 ◽  
Vol 240 ◽  
Author(s):  
G. Mclane ◽  
M. Meyyappan ◽  
M. W. Cole ◽  
H. S. Lee ◽  
R. Lareau ◽  
...  
Keyword(s):  
Minimal Surface ◽  
Reactive Ion Etching ◽  
Surface Region ◽  
Surface Damage ◽  
Silicon Tetrachloride ◽  
Attractive Alternative ◽  
Ion Etching

ABSTRACTMagnetron reactive ion etching is an attractive alternative to reactive ion etching since it has the potential for producing minimal surface damage while still retaining the advantages of reactive ion etching. We report here the results of a study of GaAs magnetron ion etching using Freon-12 and silicon tetrachloride etch gases. Differences are found in etch profiles and surface region characteristics of GaAs samples etched by the two gases. The relevant mechanisms are discussed.

The study on EUV mask cleaning without Ru surface damage

2014 ◽  
Author(s):  
Daisuke Matsushima ◽  
Kensuke Demura ◽  
Satoshi Nakamura ◽  
Masafumi Suzuki ◽  
Katsuhiro Kishimoto ◽  
...  
Keyword(s):  
Surface Damage ◽  
Mask Cleaning

Surface Structure in Microtomed Sections Caused by Glass and Diamond Knives

1971 ◽  
Vol 29 ◽  
pp. 456-457
Author(s):  
J. Temple Black ◽  
William G. Boldosser
Keyword(s):  
Plastic Deformation ◽  
Epoxy Resin ◽  
Carbon Coating ◽  
Surface Damage ◽  
Body Angle ◽  
Normal Manner ◽  
Bottom Side ◽  
Cutting Direction ◽  
Made In ◽  
Diamond Knife

Ultramicrotomy produces plastic deformation in the surfaces of microtomed TEM specimens which can not generally be observed unless special preparations are made. In this study, a typical biological composite of tissue (infundibular thoracic attachment) infiltrated in the normal manner with an embedding epoxy resin (Epon 812 in a 60/40 mixture) was microtomed with glass and diamond knives, both with 45 degree body angle. Sectioning was done in Portor Blum Mt-2 and Mt-1 microtomes. Sections were collected on formvar coated grids so that both the top side and the bottom side of the sections could be examined. Sections were then placed in a vacuum evaporator and self-shadowed with carbon. Some were chromium shadowed at a 30 degree angle. The sections were then examined in a Phillips 300 TEM at 60kv.Carbon coating (C) or carbon coating with chrom shadowing (C-Ch) makes in effect, single stage replicas of the surfaces of the sections and thus allows the damage in the surfaces to be observable in the TEM. Figure 1 (see key to figures) shows the bottom side of a diamond knife section, carbon self-shadowed and chrom shadowed perpendicular to the cutting direction. Very fine knife marks and surface damage can be observed.

Quantitative surface damage studies by H.R.E.M.

1989 ◽  
Vol 47 ◽  
pp. 632-633
Author(s):  
S. R. Singh ◽  
H. J. Fan ◽  
L. D. Marks
Keyword(s):  
Solar Wind ◽  
Quantitative Analysis ◽  
Surface Science ◽  
Surface Damage ◽  
Space Environment ◽  
Oxygen Desorption ◽  
The Past ◽  
Diffusion Controlled ◽  
Original Observation ◽  
Substantial Interest

Since the original observation that the surfaces of materials undergo radiation damage in the electron microscope similar to that observed by more conventional surface science techniques there has been substantial interest in understanding these phenomena in more detail; for a review see. For instance, surface damage in a microscope mimics damage in the space environment due to the solar wind and electron beam lithographic operations.However, purely qualitative experiments that have been done in the past are inadequate. In addition, many experiments performed in conventional microscopes may be inaccurate. What is needed is careful quantitative analysis including comparisons of the behavior in UHV versus that in a conventional microscope. In this paper we will present results of quantitative analysis which clearly demonstrate that the phenomena of importance are diffusion controlled; more detailed presentations of the data have been published elsewhere.As an illustration of the results, Figure 1 shows a plot of the shrinkage of a single, roughly spherical particle of WO3 versus time (dose) driven by oxygen desorption from the surface.

Study of Tip-Surface Interactions in Scanning Tunneling Microscopy (STM) by Reflection Electron Microscopy (REM)

1990 ◽  
Vol 48 (1) ◽  
pp. 320-321
Author(s):  
W. Lo ◽  
J.C.H. Spence ◽  
M. Kuwabara
Keyword(s):  
High Resolution ◽  
Elastic Strain ◽  
Tunneling Current ◽  
Surface Damage ◽  
Surface Interactions ◽  
Graphite Surface ◽  
Scanning Tunneling ◽  
Large Area ◽  
Tunneling Microscopy ◽  
High Resolution Tem

Work on the integration of STM with REM has demonstrated the usefulness of this combination. The STM has been designed to replace the side entry holder of a commercial Philips 400T TEM. It allows simultaneous REM imaging of the tip/sample region of the STM (see fig. 1). The REM technique offers nigh sensitivity to strain (<10−4) through diffraction contrast and high resolution (<lnm) along the unforeshortened direction. It is an ideal technique to use for studying tip/surface interactions in STM.The elastic strain associated with tunnelling was first imaged on cleaved, highly doped (S doped, 5 × 1018cm-3) InP(110). The tip and surface damage observed provided strong evidence that the strain was caused by tip/surface contact, most likely through an insulating adsorbate layer. This is consistent with the picture that tunnelling in air, liquid or ordinary vacuum (such as in a TEM) occurs through a layer of contamination. The tip, under servo control, must compress the insulating contamination layer in order to get close enough to the sample to tunnel. The contaminant thereby transmits the stress to the sample. Elastic strain while tunnelling from graphite has been detected by others, but never directly imaged before. Recent results using the STM/REM combination has yielded the first direct evidence of strain while tunnelling from graphite. Figure 2 shows a graphite surface elastically strained by the STM tip while tunnelling (It=3nA, Vtip=−20mV). Video images of other graphite surfaces show a reversible strain feature following the tip as it is scanned. The elastic strain field is sometimes seen to extend hundreds of nanometers from the tip. Also commonly observed while tunnelling from graphite is an increase in the RHEED intensity of the scanned region (see fig.3). Debris is seen on the tip and along the left edges of the brightened scan region of figure 4, suggesting that tip abrasion of the surface has occurred. High resolution TEM images of other tips show what appear to be attached graphite flakes. The removal of contamination, possibly along with the top few layers of graphite, seems a likely explanation for the observed increase in RHEED reflectivity. These results are not inconsistent with the “sliding planes” model of tunnelling on graphite“. Here, it was proposed that the force due to the tunnelling probe acts over a large area, causing shear of the graphite planes when the tip is scanned. The tunneling current is then modulated as the planes of graphite slide in and out of registry. The possiblity of true vacuum tunnelling from the cleaned graphite surface has not been ruled out. STM work function measurements are needed to test this.

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